超精密机床主轴回转误差在线测试与评价技术  

On-line measurement and evaluation of spindle error motion in ultra precision machine tool

作　　者：孙郅佶[1,2] 安晨辉[1] 杨旭[1,2] 张清华[1] 王健[1] 毕果[2] 

机构地区：[1]成都精密光学工程研究中心,四川成都610041 [2]厦门大学机电工程系,福建厦门361005

出　　处：《制造技术与机床》2015年第9期118-123,共6页Manufacturing Technology & Machine Tool

基　　金：高档数控机床与基础制造装备"强激光光学元件超精密制造关键装备研制"(2013ZX04006011-102-001)

摘　　要：为了实现对超精密机床主轴回转误差的在线测试与评价,建立了纳米级在线测试与评价系统。对该系统所采用的测试仪器、干扰抑制、数据处理与指标评价方法进行研究。首先,在某台超精密切削机床上搭建了由5个电容传感器组成的5通道测试模块。接着,以多通道高速数据采集模块实现多通道位移数据模拟量的高速采集。然后,对采集的信号进行必要的干扰信号分离。最后,将5通道位移数据转换为易于理解的轴向误差和径向误差数据,并按照同步误差和异步误差进行分离。测试结果表明:该机床主轴工作转速下的径向同步误差为405 nm,径向异步误差为66 nm;轴向同步误差为59 nm,轴向异步误差为54 nm。能够实现超精密机床主轴回转误差的纳米级在线测试,对于超精密光学加工表面的误差溯源和机床主轴性能分析具有重要意义。In order to realize the on - line measurement and analysis of spindle error motion in ultra precision ma- chine, a nano -class testing and evaluation system is established and its measurement instruments, in- terference control, data processing, evaluation methods and etc. are investigated. Firstly, a five - chan- nel module consisted of five capacitance sensors is established on an ultra precision cutting machine. All the five channels of the displacement sensors are sampled via a high speed data acquisition system simul- taneously. Secondly, the separation of interference signals from displacement sensors has been carried out. Finally, the displacement signals are transformed into radial error and axial error, and are separa- ted as synchronous and asynchronous error. Experimental results indicate that the synchronous error and the asynchronous error in radial direction are 405 nm and 66 nm respectively, and the synchronous error and the asynchronous error in axial direction are 59 nm and 54 nm respectively. It can meet the system demands of nano - class, on - line measurement of ultra precision spindle. Thus, it is of great impor- tance for the optical work piece＇ s surface error tracing, and the spindle＇ s performance analyzing.

关 键 词：超精密机床主轴 在线测试 回转误差 异步误差 

分 类 号：TH133.36[机械工程—机械制造及自动化]