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机构地区:[1]Key Laboratory of Instrumentation Science & Dynamic Measurement,Ministry of Education,North University of China [2]Key Laboratory of Science and Technology on Electronic Test & Measurement,North University of China
出 处:《Journal of Semiconductors》2015年第7期140-147,共8页半导体学报(英文版)
基 金:Project supported by the National Natural Science Foundation of China(No.61127008);the Subsidized Program of the National High Technology Research and Development Program of China(No.2011AA040404)
摘 要:This paper presents a transimpedance amplifier (TIA) capacitance detection circuit aimed at detecting micro-capacitance, which is caused by ultrasonic stimulation applied to the capacitive micro-machined ultrasonic transducer (CMUT). In the capacitance interface, a TIA is adopted to amplify the received signal with a center frequency of 400 kHz, and finally detect ultrasound pressure. The circuit has a strong anti-stray property and this paper also studies the calculation of compensation capacity in detail. To ensure high resolution, noise analysis is conducted. After optimization, the detected minimum ultrasound pressure is 2.1 Pa, which is two orders of magni- tude higher than the former. The test results showed that the circuit was sensitive to changes in ultrasound pressure and the distance between the CMUT and stumbling block, which also successfully demonstrates the functionality of the developed TIA of the analog-front-end receiver.This paper presents a transimpedance amplifier (TIA) capacitance detection circuit aimed at detecting micro-capacitance, which is caused by ultrasonic stimulation applied to the capacitive micro-machined ultrasonic transducer (CMUT). In the capacitance interface, a TIA is adopted to amplify the received signal with a center frequency of 400 kHz, and finally detect ultrasound pressure. The circuit has a strong anti-stray property and this paper also studies the calculation of compensation capacity in detail. To ensure high resolution, noise analysis is conducted. After optimization, the detected minimum ultrasound pressure is 2.1 Pa, which is two orders of magni- tude higher than the former. The test results showed that the circuit was sensitive to changes in ultrasound pressure and the distance between the CMUT and stumbling block, which also successfully demonstrates the functionality of the developed TIA of the analog-front-end receiver.
关 键 词:TIA capacitance detection CMUT high resolution distance test
分 类 号:TM934.2[电气工程—电力电子与电力传动] TN722[电子电信—电路与系统]
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