热处理对钛酸锶钡薄膜光学性能的影响  

Effect of Heat-treatment on the Optical Properties of Barium Strontium Titanate Thin Films

作　　者：赵丽丽[1] 翟春雪[1] 朱红丹[1] 廖付友[1] 刘艳秋[1] 

机构地区：[1]西北大学信息科学与技术学院,西安710127

出　　处：《材料导报》2015年第18期24-27,共4页Materials Reports

基　　金：国家自然科学基金(61240016);陕西省科技攻关项目(2012GY2-36);陕西省教育厅项目(12JK0538);西北大学信息学院青年基金

摘　　要：采用无水溶胶-凝胶技术制备了钛酸锶钡光学薄膜,研究了预处理温度对钛酸锶钡薄膜表面形貌的影响,系统分析了退火温度对钛酸锶钡薄膜的相结构、微观形貌和光学性能的影响.结果表明,膜的物相、结构和形貌均对其光学性能起决定作用,制备致密、均匀的晶态薄膜是使钛酸锶钡薄膜具有高的光学透过率、大的折射率和小的消光系数的关键.通过150℃预处理和850℃退火获得了晶化程度良好,表面形貌平整、致密的钛酸锶钡薄膜,该膜在350～1000nm的最大光透过率为80.72％,在600～1000nm的折射率稳定在约1.93,在400～1000nm范围消光系数稳定在约4×10-5.Barium Strontium Titanate （BST） thin films were prepared in sol-gel process without water in the system. Effect of the preheat treatment on the morphology of BST thin films was investigated. Furthermore, effects of annealing temperature on the phase structure, micro-morphology and optical properties of BST thin films were ana- lyzed in detail. The experiment results show that the optical properties of thin films are directly affected by the thin film phase, structure and micro-morphology. To achieve high light transmittance, big refractive index and small ex- tinction coefficient, it is essential to prepare the crystalline BST films with dense microstructure and uniform grain size. The crystallized BST thin films with dense and good morphology were prepared through pre-heat treatment at 150 ℃ and then annealed at 850 ℃. The transmittance maximum of the as-prepared thin film is 80. 72% in the wave- length range from 350 to 1000 nrra The refractive index of this sample is around 1.93 in the range of from 600 to 1000 nm. The extinction index of thin film is about 4 ×10-5 in the range of from 400 to 1000 nrn

关 键 词：钛酸锶钡 薄膜 预处理 退火 光学性能 

分 类 号：TB34[一般工业技术—材料科学与工程]