退火处理对TiSiCN、TiCrSiCN及CrSiCN涂层结构和机械性能的影响  

Effect of annealing on microstructure and mechanical properties of TiSiCN,TiCrSiCN,and CrSiCN coatings

作　　者：辛欣[1] 苏永要[2] 王愉[1] 喻燕[1] 冷永祥[1] 

机构地区：[1]西南交通大学材料科学与工程学院,四川成都610031 [2]重庆文理学院新材料技术研究院,重庆402160

出　　处：《电镀与涂饰》2015年第18期1062-1067,共6页Electroplating & Finishing

基　　金：重庆市基础与前沿研究计划项目(cstc2013jcyj A50036)

摘　　要：用等离子体增强磁控溅射(PEMS)方法制备了Ti Si CN、Ti Cr Si CN和Cr Si CN涂层,并在空气中进行700°C退火处理。利用扫描电子显微镜、能谱仪和X射线衍射仪表征了退火处理前后涂层的断面形貌、成分和微结构。研究了退火处理对3种涂层的硬度、韧性和膜基结合性能的影响以及它们的高温抗氧化性能。结果表明:退火处理后,Ti Si CN涂层表面形成了一层均匀且较厚(1.50μm)的富氧层;Cr Si CN涂层的氧化层不均匀且富氧层较薄(0.50μm);Ti Cr Si CN涂层较致密,未检测到氧化物存在。3种涂层的韧性和硬度在退火后都出现不同程度的降低,硬度分别降低了20 GPa(Ti Si CN涂层)、9 GPa(Cr Si CN涂层)和5 GPa(Ti Cr Si CN涂层)。退火后,Ti Si CN涂层与基体的结合性能有较明显的提高,Ti Cr Si CN涂层的膜基结合性能变化不大,Cr Si CN涂层的结合性能则出现一定减弱。Ti Si CN和Cr Si CN涂层的脆性氧化层易产生分层和剥离,而Ti Cr Si CN涂层表现出最佳的高温抗氧化性能。Three kinds of coatings, TiSiCN, TiCrSiCN, and CrSiCN, were deposited by plasma-enhanced magnetron sputtering （PEMS） technique and then annealed at 700 ℃ in air. The cross-sectional morphology, elemental composition, and microstructure of the coatings before and after annealing were characterized by scanning electron microscope （SEM）, energy- dispersive spectroscope （EDS）, and X-ray diffractometer （XRD）. The influence of annealing on the hardness, toughness, and adhesion to substrate of these three coatings and their oxidation resistance at high temperature were studied. The results showed that, after annealing, a thick homogeneous oxygen-enriched layer （1.50 μm） is formed on the surface of TiSiCN coating. The oxide layer formed on the CrSiCN coating is heterogeneous with a thin oxygen-enriched layer （0.50μm）. TiCrSiCN coating is dense, on which no oxide was detected. The toughness and hardness of all three coatings are decreased after annealing to various degrees. The decrease of hardness is 20 GPa for TiSiCN, 9 GPa for CrSiCN, but only 5 GPa for TiCrSiCN. After annealing, the adhesion to substrate is increased greatly for TiSiCN coating, changed slightly for TiCrSiCN coating, and declined to a certain extent for CrSiCN coating. The brittle oxide layers formed on TiSiCN and CrSiCN coatings are easy to be stratified and exfoliated. TiCrSiCN coating has the optimal oxidation resistance at high temperature. titanium-silicon-carbon-nitrogen; titanium-chromium-silicon-carbon-nitrogen; chromium-silicon-carbon-nitrogen; nanocomposite coating; plasma-enhanced magnetron sputtering; high-temperature annealing; oxidation resistance

关 键 词：钛硅碳氮 钛铬硅碳氮 铬硅碳氮 纳米复合涂层 等离子体增强磁控溅射 高温退火 抗氧化性 

分 类 号：TB383[一般工业技术—材料科学与工程]