加速器钛窗硬钎焊工艺研究  

Study on Brazing Technology of Titanium Window for Accelerator

作　　者：张永清[1] 丁耀根[1] 王小霞[1] 杜锡九 阎旭[1] 高向阳[1] 

机构地区：[1]中国科学院电子学研究所高功率微波源与技术重点实验室,北京100190 [2]广东中能加速器科技有限公司,广东东莞523808

出　　处：《真空电子技术》2015年第4期28-32,共5页Vacuum Electronics

基　　金：广东省引进创新科研团队计划资助(项目编号:201001D0104732255)

摘　　要：为解决钛窗采用软钎焊工艺制造存在结构复杂、耐热性差的问题,对钛窗硬钎焊工艺进行了研究。选用了BAg72Cu-V银铜钎料、云母片、真空炉、氦质谱检漏仪和扫描电镜等材料及设备,研究了云母片放置方式、钎焊工艺参数对接头质量的影响、钛窗宏观及微观质量以及钛窗在术中放射治疗加速器中的应用情况。研究表明,采用云母片叠层放置以隔离钛箔与模具、采用815℃×3min的真空钎焊参数,可以获得质量良好的钎焊接头。研究还发现,钎焊过程中存在较为强烈的钛、铜基体向液态钎料中溶解的现象,这一现象有助于提高钎焊接头的强度。To solve the problems such as complicated structure, poor heat resistance resulted from soft soldering in titanium window manufacturing, brazing technology is studied. BAg72Cu-V silver copper solder, mica plate, vacuum furnace, helium mass spectrometer leak detector and scanning electron micros- copy are used as test materials and equipment. The influence of the palcement of mica sheet, the brazing parameters on the joint, the macro and micro quality of the titanium window, and the application of titani- um window in intraoperative radiotherapy accelerator are studied. The research shows that, by using the mica sheet to isolate the titanium foil and the mold, high quality brazing joint can be obtained under a bra- zing temperature of 815℃ for 3 rain. The research also shows that titanium-copper base can be dissolved into liquid solder which is helpful to improve the strength of the brazing joint.

关 键 词：钛窗 钎焊 Ag-Cu钎料 云母片 

分 类 号：TG146.23[一般工业技术—材料科学与工程]