组合式MEMS三维矢量水声传感器  

Combined MEMS 3D Vector Acoustic Sensors

作　　者：郭楠[1,2] 张国军[1,2] 刘梦然[1,2] 简泽明[1,2] 张文栋[1,2] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]中北大学电子测试技术重点实验室,太原030051

出　　处：《微纳电子技术》2015年第9期565-569,596,共6页Micronanoelectronic Technology

基　　金：国家高技术研究发展计划(863计划)资助项目(2013AA09A414);国家自然科学基金资助项目(61127008;51205374);山西省青年科技研究基金资助项目(2012021013-3)

摘　　要：针对小体积水下装置平台对声目标空间定位的高精度需求,在单个二维硅微MEMS仿生矢量水声传感器的基础上,提出一种组合式MEMS三维矢量水声传感器,解决当前二维矢量水声传感器不能实现对声目标进行空间定向的难题。该组合式MEMS三维矢量水声传感器包括由正交方向上两个四梁-柱体组成的二维水平检测单元。首先理论分析提出的组合式MEMS三维矢量水声传感器的空间定向原理,然后采用标准硅微加工工艺制作组合式MEMS三维矢量水声传感器样机。利用回转装置对加工出的组合式MEMS三维矢量水声传感器样机进行性能测试。测试结果表明,该组合式MEMS三维水声传感器在空间三个方向均具有良好的"8"字形指向性,可以实现对声目标的三维探测。Aiming at the high accurate requirement of the underwater equipment platform with small volume for spatial orientation of the acoustic target,based on the single 2D silicon micro MEMS bionic vector acoustic sensor,a kind of combined MEMS 3D vector acoustic sensor was proposed,solving the problem that current 2D vector acoustic sensor can not realize the spatial orientation of the acoustic target.The combined MEMS3 D vector acoustic sensor includes the 2D level detection unit composed by two four-beam-cylinders in the orthogonal direction.Firstly,the spatial orientation principle of the proposed combined MEMS3 D vector acoustic sensor was theoretically analyzed.Then the prototype of the combined MEMS3 D vector acoustic sensor was fabricated by the standard silicon micromachining technology.Finally,the performance of the combined MEMS 3D vector acoustic sensor was tested by using the rotary device.The measurement results show that the combined MEMS3 D vector acoustic sensor has good ＂8＂-shape directivity in all three orientations and can realize the 3D detection for acoustic targets.

关 键 词：微机电系统(MEMS) 矢量水声传感器 三维探测 空间定向 指向性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH703[自动化与计算机技术—控制科学与工程]