车载大口径FSM用SiC反射镜制备工艺研究  

Research onpreparation process of SiC reflector for vehicle-mounted large-diameter fast steering mirror

作　　者：徐新行[1,2] 陈宁[1] 时魁[1] 庄昕宇[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《激光与红外》2015年第9期1093-1099,共7页Laser & Infrared

基　　金：吉林省自然科学基金资助项目(No.201115123);"863"项目(No.2011AA7031024G)资助

摘　　要：为了获得高面形精度、高反射率的轻质反射镜,选用Si C为基底材料,对反射镜的加工制备工艺进行了深入研究。首先从车载大口径FSM中平面反射镜的应用需求出发,提出了反射镜的主要设计指标。然后,针对反射镜的轻量化结构采用反应烧结法获得镜坯,并通过机械加工使其接近成型;继而采用物理气相沉积法对Si C反射镜进行表面改性处理,进而采用古典抛光法对反射镜进行光学精加工;最后在反射镜的工作表面镀覆金反射膜。在完成车载大口径FSM用Si C反射镜的加工制备后,对反射镜的面形精度和反射率进行了实验检测。结果显示:Si C反射镜的面形精度(RMS值)优于λ/30;对中波激光的反射率约为98.0%,对长波激光的反射率约为98.2%;均满足车载大口径FSM的应用需求。To obtain lightweight reflector with high surface accuracy and high reflectivity, SiC was chosen to manufacture reflector, and its preparation process was researched in detail. Firstly, the main design indexes of reflector were proposed on the basis of application requirement for vehiclE-mounted large-diameter fast steering mirror. Then reflector flan was sintered according to lightweight structure of reflector and it was processed to mould by machining. Subsequently the SiC reflector was polishing processed by conventional polishing method after surface modification by physical vapor deposition. Finally, gold reflecting film was coated on the working surface of reflector. After preparation of SiC reflector,its surface accuracy and reflectivity were tested respectively, and the measurement results show that surface accuracy （ root-mean-square value） of reflector is less than ）λ/30, and its reflectivity for medium wavelength laser is about 98% ;its reflectivity for long wavelength laser is about 98.2% ,which can satisfy application requirements of vehiclE-mounted large-diameter fast steering mirror.

关 键 词：SiC反射镜 制备工艺 面形精度 反射率 

分 类 号：TH743[机械工程—光学工程]