感应耦合氩等离子体反应器内流场的三维数值模拟（英文）  

THREE-DIMENSION NUMERICAL SIMULATION OF THE FLOW FIELD IN THE INDUCTIVELY COUPLED ARGON PLASMA REACTOR

作　　者：施阳和[1] 郑华[1] 邵宗恒[1] 

机构地区：[1]华东交通大学机电工程学院,南昌330013

出　　处：《低温物理学报》2015年第5期396-404,共9页Low Temperature Physical Letters

基　　金：Project supported by the Natural Science Foundation of Jiangxi Province(Grant No.20132BAB201047)~~

摘　　要：感应耦合等离子体反应器内流场的三维数值模拟可以揭示其复杂的空间分布.利用PROE软件建立反应器的三维模型.假设等离子体是良好的导体,结合麦克斯韦方程组以及电磁学和流体力学方程,经过推导得到磁流体力学的连续、动量、能量方程.利用FLUENT软件的二次开发功能完成耦合计算.磁场的矢量方程通过复矢量技术和UDS得到解决,利用UDS定义变物性参数和添加源项.在C语言的基础上编写UDF.将划分好网格的模型和UDF导入FLUENT中,应用基于压力法的求解器进行模拟运算.通过模拟运算得到了反应器内电磁场、温度场、速度场的分布图.最后进行了二维模拟和三维模拟的对比,以验证文中所进行模拟所得结果的可行性.3D numerical simulation of the flow field in the inductively coupled plasma reactor has been performed to reveal the complexity of the reactor. Using the software PROE to build the 3D model of the reactor. Assuming that plasma flow is a good conductor, comparing the Maxwell equations with the equations of electromagnetic field and fluid mechanics, the momentum, energy and continuity equations of the Magnetohydrodynamics（MHD） were deducted. Using the secondary development of the FLUENT software to solve the coupling calculation of multi- physics field. The vector equation of the magnetic field is solved by using the complex vector technology and User- Defined Scalar（UDS）. Taking advantage of the LIDS to define variable physical parameters and add the source term. By means of language C to compile User-Defined Function （UDF）. The model is meshed and imported into the FLUENT, the same as the UDF. By applying the pressure based solver which uses pressure correction algorithm as solving scheme provided by the FLUENT to conduct the calculations. Pass the simulation, the distribution of the magnetic vector potential, temperature field and velocity field about the flow field in the inductively coupled plasma reactor can be achieved. Finally, a comparison of the simulation results between the 3-D and 2-D model was made to verify the feasibility of the numerical simulation in the paper.

关 键 词：感应耦合等离子反应器 数值模拟 磁流体力学 用户自定义函数 

分 类 号：O53[理学—等离子体物理] O361.3[理学—物理]