机载小型化快速反射镜用微位移测量传感器设计  

Design of displacement sensor for fast steering mirror with small volume on airborne platform

作　　者：徐新行[1,2] 王恒坤[1] 韩旭东[1] 王兵[1] 高云国[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,长春130033 [2]中国科学院大学,北京100049

出　　处：《仪器仪表学报》2015年第9期1937-1944,共8页Chinese Journal of Scientific Instrument

基　　金：吉林省自然科学基金(201115123);国家863计划(2011AA7031024G)项目资助

摘　　要：为了实现机载小型化FSM的闭环控制,设计了一款小体积、高精度、高环境适应性的微位移测量传感器。首先根据位移传感器的技术原理和机载FSM的应用需求,提出了微位移测量传感器的主要设计指标。然后,分别对微位移测量传感器的发光元件、密珠滑轨、测量光栅和接收元件等进行了详细设计与选择。其中,高精度密珠滑轨的采用不仅减小了测量过程中的附加阻力,而且使光栅副的运动更加精准;光栅副通光窗口的引入、独特零件编码的设计、裂相法信号提取方式的采用,保证了微位移测量传感器的高低温性能。最后,针对微位移测量传感器在机载小型化FSM上的应用效果进行了理论分析与实验检测。结果显示:机载小型化FSM的方位指向误差不超过3.4″,俯仰指向误差不超过3.8″,证明了专用型微位移测量传感器高精度、高分辨力和高响应速度的技术特点,满足机载小型化FSM的应用需求。To realize the close-loop control of fast steering mirror with small volume on airborne platform, a displacement sensor with small volume, high precision and prefect adaptability was designed. Main design performance parameters were presented on the basis of the principle and application requirements of the displacement sensor. Lamp, slide, metrological gratings and acceptor were designed and selected respectively. High-precision slide with plenty of balls did not only decreased friction resistance, but also made scale gratings move more accurately. Windows of the grating, zero code and picking-up signal by splitting-phase method ensured the displacement sensor adaptability to high-low temperature conditions. Finally, application impact of displacement sensors were analyzed and tested, and results show that the azimuth pointing error of fast steering mirror with 4 displacement sensors for airborne platform is not more than 3.4＂ and high-low pointing error is not more than 3.8＂, which proved the designed displacement sensor with high precision, high resolution and high resonance frequency, and application requirements of fast steering mirror with small volume could be satified.

关 键 词：快速反射镜 位移传感器 测量光栅 增量式 

分 类 号：TH703[机械工程—仪器科学与技术]