流体微通道浸泡蚀刻技术实验  

Experiment on immersion chemical etching technology of fluid micro-channels

作　　者：辛菲[1] 李磊[1] 王秋旺[1] 

机构地区：[1]西安交通大学热流科学与工程教育部重点实验室,陕西西安710049

出　　处：《化工学报》2015年第10期4115-4122,共8页CIESC Journal

基　　金：国家自然科学基金国际(地区)合作与交流项目(51120165002)~~

摘　　要：微细加工技术是伴随着微制造的出现而产生的一类新型现代化制造技术,它实现了微小尺度范围内的机械加工和装配。化学蚀刻技术是微细加工技术主要的加工方法之一,包括浸泡、鼓泡、喷淋等方法,其中浸泡式蚀刻方法相对来说设备简单、操作方便、节约成本。本文采用单因素浸泡式方法对不锈钢板蚀刻进行了实验研究,研究了蚀刻时间、蚀刻液组分浓度及温度等因素对化学蚀刻质量的影响。结果表明,蚀刻液中Fe Cl3浓度、H3PO4浓度、温度等对蚀刻速度、蚀刻均匀性、侧蚀及粗糙度有较大的影响。研究结果对流体微细通道的制造提供了初步工艺参数。As a new type of modern manufacturing technologies, micro-fabrication technology comes into being with the emergence of micro-manufacturing, which realizes the machining and assembly in micro size. The chemical etching technology is one of the major processing methods for micro-fabrication technology, which includes immersing, bubbling, spraying and so on. Among them the equipment of immersion etching is simple, easy to operate and relatively low-cost. In this study, the influence of etching time, concentration of the etching liquid composition, etching temperature and other factors on the chemical etching is mainly studied by using single factor immersion method. The results show that FeCl3 concentration, H3PO4 concentration in the etching liquid, etching temperature and others heavily affected the etching rate, etching uniformity, lateral erosion and surface roughness. It provides elementary process parameters for the micro-manufacturing.

关 键 词：微制造 不锈钢板 化学反应 蚀刻溶液 蚀刻质量 表面形貌 测量 

分 类 号：TG178[金属学及工艺—金属表面处理] TQ138.1[金属学及工艺—金属学]