溅射靶功率对类金刚石碳薄膜的结构和性能影响  

Influence of Sputtering Power on the Structure and Performance of Diamond-like Carbon Films

作　　者：周升国[1] 刘正兵[1] 刘龙[1] 马利秋[1] 

机构地区：[1]江西理工大学材料科学与工程学院,江西赣州341000

出　　处：《超硬材料工程》2015年第4期25-30,共6页Superhard Material Engineering

基　　金：国家自然科学基金(No.51365016);中科院兰化所国家重点实验室开放基金(LSL-1203)

摘　　要：为改善304不锈钢的性能,扩展其应用范围,采用磁控溅射技术在不同溅射靶功率下激发高纯石墨靶在p(100)单晶硅和304不锈钢表面沉积类金刚石碳薄膜。文章对所制备的系列类金刚石碳薄膜作了Raman光谱、X射线衍射(XRD)、原子力显微镜(AFM)、断口形貌的场发射电镜(FESEM)表征,并评价了其纳米硬度与摩擦磨损行为。结果表明:所制备的类金刚石碳薄膜为典型的非晶态微结构;随着靶功率的增大,类金刚石碳薄膜的sp3键含量先增多后减少,表面粗糙度先降低后升高,硬度与弹性模量先升高后降低;靶功率200 W时类金刚石碳薄膜取得最优性能,纳米硬度为11.4GPa,弹性模量为129.3GPa,摩擦系数为0.17,磨损率为5.2×10-7 mm3(N·m)-1。In order to improve the performance of 304 stainless steel and to extend its appli-cation field,high purity graphite target is to be stimulated to deposite diamond-like car-bon film on the surface of p（100）monocrystalline silicon and 304 stainless steel through magnetron sputtering technique under different sputtering powers.In this article,the se-ries of diamond-like carbon films have been analyzed and studied through Raman spectros-copy,XRD,AFM and FESEM and their nano-hardness and friction and wear behavior have been evaluated.Result shows that the diamond-like carbon films developed have a typical amorphous microstructure.As the target power increases,the content of sp3 bond first increases and then decreases;the surface roughness first decreases and then increa-ses;the hardness and elasticity modulus first increases and then decreases.The diamond-like carbon film presents the best performance when the target power is at 200W with a nano hardness of 1 1.4 GPa,elasticity modulus of 129.3 GPa,friction coefficient of 0.17 and wear rate of 5.2×10 -7 mm3 （N·m）-1 .

关 键 词：靶功率 类金刚石碳 纳米硬度 摩擦磨损 

分 类 号：TB383.2[一般工业技术—材料科学与工程] TQ163[化学工程—高温制品工业]