TFBG的Fabry-Perot干涉型纵向微位移传感研究  

Micro-displacement measurement based on Fabry-Perot interferometer by using tilted fiber Bragg grating

作　　者：刘卫东 王友清[2] 路艳芳 金尚忠[2] 沈常宇[2] 

机构地区：[1]河北省计量监督检测院,河北石家庄050051 [2]中国计量学院光学与电子科技学院,浙江杭州310018

出　　处：《中国计量学院学报》2015年第3期300-304,共5页Journal of China Jiliang University

摘　　要：提出了一种利用光纤Fabry-Perot（F-P）干涉结构的微位移传感器,该F-P干涉结构是由双倾斜光纤光栅（tilted fiber Bragg grating,TFBG）沿轴向错开一定距离构成空气腔形成的.入射光经双TFBG及其高反射端面往返传播,从而构成F-P干涉结构.光纤沿纵（z轴）向移动时,F-P腔的腔长发生变化,致使干涉光谱的自由光谱范围随之产生变化.实验验证,该传感器在0~115μm的测量范围内获得了高达0.475nm/μm的灵敏度,较之前提出的光纤光栅型传感器灵敏度提高了近3倍.A compact micro-displacement Fabry-Perot （F-P） sensor by the wavelength demodulation method was proposed, which was based on two tilted fiber Bragg gratings （TFBG） with an air cavity. The F-P interference was formed as the incident light transmitted through the dual TFBGs and its high reflective surface. The length of the air-cavity of the proposed F-P interferometer would change by moving one of the TFBGs along the axial direction, which would lead to changes of the wavelength spacing between two interferences spectral （free spectral range, FSR）. Experimental results showed that the sensitivity of the sensor within the measurement range of 0 to 115μm was about 0. 475 nm/μm, which was nearly 3 times higher than that of the current paper reported.

关 键 词：光纤传感器 倾斜光纤光栅 微位移测量 Fabry-Perot干涉仪 

分 类 号：TN253[电子电信—物理电子学]