Femtosecond laser 3D fabrication of whispering-gallerymode microcavities  

作　　者：XU HuaiLiang SUN HongBo 

机构地区：[1]State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University

出　　处：《Science China(Physics,Mechanics & Astronomy)》2015年第11期2-10,共9页中国科学：物理学、力学、天文学（英文版）

基　　金：supported by the National Key Basic Research Program of China(Grant No.2014CB921302);the National Natural Science Foundation of China(Grant Nos.61427816 and 61235003);Research Fund for the Doctoral Program of Higher Education of China,and Fundamental Research Funds of Jilin University

摘　　要：Whispering-gallery-mode(WGM) microcavities with high-quality factors and small volumes have attracted intense interests in the past decades because of their potential applications in various research fields such as quantum information, sensing, and optoelectronics. This leads to rapid advance in a variety of processing technologies that can create high-quality WGM micro-cavities. Due to the unique characteristics of femtosecond laser pulses with high peak intensity and ultrashort pulse duration, femtosecond laser shows the ability to carry out ultrahigh precision micromachining of a variety of transparent materials through nonlinear multiphoton absorption and tunneling ionization. This review paper describes the basic principle of femtosecond laser direct writing, and presents an overview of recent progress concerning femtosecond laser three-dimensional(3D) fabrications of optical WGM microcavities, which include the advances in the fabrications of passive and active WGMs microcavities in a variety of materials such as polymer, glass and crystals, as well as in processing the integrated WGM-microcavity device. Lastly, a summary of this dynamic field with a future perspective is given.Whispering-gallery-mode(WGM) microcavities with high-quality factors and small volumes have attracted intense interests in the past decades because of their potential applications in various research fields such as quantum information, sensing, and optoelectronics. This leads to rapid advance in a variety of processing technologies that can create high-quality WGM micro-cavities. Due to the unique characteristics of femtosecond laser pulses with high peak intensity and ultrashort pulse duration, femtosecond laser shows the ability to carry out ultrahigh precision micromachining of a variety of transparent materials through nonlinear multiphoton absorption and tunneling ionization. This review paper describes the basic principle of femtosecond laser direct writing, and presents an overview of recent progress concerning femtosecond laser three-dimensional(3D) fabrications of optical WGM microcavities, which include the advances in the fabrications of passive and active WGMs microcavities in a variety of materials such as polymer, glass and crystals, as well as in processing the integrated WGM-microcavity device. Lastly, a summary of this dynamic field with a future perspective is given.

关 键 词：MICROCAVITY FABRICATION femtosecond laser 

分 类 号：O437[机械工程—光学工程]