微透镜阵列误差对半导体激光匀化性能的影响  

Effects of microlens array positon error on diode laser beam homogenization

作　　者：雷呈强[1] 汪岳峰[1] 殷智勇 尹韶云[3] 孙秀辉[3] 杜春雷[3] 

机构地区：[1]军械工程学院电子与光学工程系,河北石家庄050003 [2]装备学院航天指挥系,北京101416 [3]中国科学院重庆绿色智能技术研究院集成光电技术研究中心,重庆400714

出　　处：《强激光与粒子束》2015年第9期13-19,共7页High Power Laser and Particle Beams

基　　金：国家高技术发展计划项目

摘　　要：为了减小微透镜阵列误差对匀化光斑的影响,深入研究微透镜阵列光束匀化系统中微透镜阵列相对位置误差对光束匀化性能的影响,设计了一种微透镜阵列光束匀化系统。依据相对位置误差类型的不同,将双列微透镜阵列间六个自由度变化导致的误差分为距离误差、偏移误差以及转动误差进行分析,并对每种误差对光束匀化性能的影响进行了研究。采用6板条半导体激光器堆栈对上述匀化系统进行实验验证,实现了均匀性为90.75%的光斑,并对系统影响光斑性能的原因进行了分析。In order to minimize the effect of microlens array position error on homogenized spot,the influence of microlens array relative position error on diode laser beam's homogenized spot is researched,and a laser diode beam homogenization system based on microlens array is designed.The position errors owning to the variation of six degrees of freedom between the two arrays are classified into distance error,offset error and rotation error,and the effects of the three kinds of position errors on beam homogenization are studied.The homogenization system is tested by a laser diode array consisting of 6bars,a uniform pumped spot with 90.75% homogeneity is achieved,and the factors influencing the spot homogeneity are analyzed.

关 键 词：激光技术 微透镜阵列 位置误差 半导体激光 均匀光斑 

分 类 号：TN248.4[电子电信—物理电子学]