高数值孔径系统多重初级像差对高斯光束的影响（英文）  

Studying the Combined Effects of Primary Aberrations on Gaussian Beam in High NA Focusing System

作　　者：李红福[1,2] 解慧明 张琛[1] 王凯歌[1] 王爽[1] 贺庆丽[2] 白晋涛[1] 

机构地区：[1]西北大学光子学与光子技术研究所省部共建光电技术与功能材料国家重点实验室培育基地,西安710069 [2]西北大学物理学院,西安710069 [3]西安市教育科学研究所,西安710003

出　　处：《光子学报》2015年第9期66-72,共7页Acta Photonica Sinica

基　　金：The National Natural Science Foundation of China(No.61378083);the International Cooperation Foundation of the National Science and Technology Major Project of the Ministry of Science and Technology of China(No.2011DFA12220);the Major Research Plan of the National Natural Science Foundation of China(No.91123030);the Natural Science Foundation of Shaanxi Province of China(Nos.2010JS110,2013SZS03-Z01)

摘　　要：为了揭示高数值孔径光学系统在多重初级像差共同作用时受到的影响,基于衍射理论,研究了多重初级像差,特别是彗差、象散和球差对汇聚高斯光束的影响效果.通过数值模拟计算,获得了在彗差、象散和球差共同作用下,汇聚高斯光束在焦平面处光斑的光强分布,发现多重像差对聚焦光斑的影响并非各单像差影响效果的简单叠加.通过对高数值孔径光学系统激光焦斑的实际测量,发现其光强分布特点与数值模拟结果具有高度的一致性.研究结果对于评估与分析实际的光学系统具有一定的指导意义.For purpose of revealing the negative impacts of multiple primary aberrations in high numerical aperture optical system, the combined influence of the primary aberrations, especially coma, astigmatism and spherical aberration, on focusing Gaussian beam in high numerical aperture system was carried out based on diffraction theory. The intensity distribution of the Gaussian beam focal spot suffering multiple influence of coma, astigmatism and spherical aberration were acquired by numerical simulation. The results show that the impact of multiple abrration was not only superimposed of single aberration. In addition, a high consistency was found between the simulation results and the laser spots captured on the focal plane of a self-made high numerical aperture system, which indicated the reliability and reasonableness of the numerical simulation. The results present the optical distribution properties of Gaussian beam receiving multiple primary aberration effects, which will be helpful for evaluating and analyzing the practical optical focusing system.

关 键 词：多重初级像差 高数值孔径 衍射理论 高斯光束 数值模拟 

分 类 号：O43[机械工程—光学工程]