条纹反射法检测光学反射镜面形  

Test of Optical Mirror Surface Using Fringe Reflection System

作　　者：袁婷[1,2] 张峰[1] 陶小平 周润[1,2] 付锦江[1,2] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,中国科学院光学系统先进制造技术重点实验室,长春130033 [2]中国科学院大学,北京100049

出　　处：《光子学报》2015年第9期86-91,共6页Acta Photonica Sinica

基　　金：国家自然科学基金项目(No.61036015)资助~~

摘　　要：针对光学反射镜在精磨向初抛光过渡阶段时面形与理想面形存在较大偏差的问题,采用轮廓仪和普通干涉仪检测无法满足加工检测需求的问题,提出采用动态范围大且准确度高的条纹反射法来检测光学反射镜.研究分析了条纹反射检测系统的原理及系统误差,运用光线追迹软件对条纹反射检测100mm口径反射镜面形进行建模仿真,并对已经加工完成的100mm口径旋转对称球面反射镜进行了检测,测量得到的面形误差峰谷值及均方根值分别为0.523μm和0.086μm,满足该过渡阶段的检测需求.Large shape errors can be found from the stage of fine grinding to the beginning of polish, it is proved that it can＇t satisfy the measuring requirements to test the mirrors with profilers or ordinary interferometer in that stage. To obtain the optical mirrors＇ shape error based on fringe reflection, the method of high precision and large dynamic is proposed. The principle and system errors of the testing system were analyzed. To verify the feasible of the testing system, the model of testing on a reflecting mirror （the aperture is 100 mm） was built and simulated by ray tracing. The preliminary testing data on rotational symmetry spherical mirror is： PV is 0. 523μm, RMS is 0. 086μm, The feasibility of the testing system based on fringe reflection used in this period is verified.

关 键 词：条纹反射 光学检测 光线追迹 误差分析 

分 类 号：TN247[电子电信—物理电子学]