金属微孔膜在多晶硅生产中的应用研究  

Application Research of Metal Microporous Membranes in the Polysilicon Production

作　　者：杨保军[1] 汪强兵[1] 汤慧萍[1] 李烨[1] 杨坤[1] 

机构地区：[1]西北有色金属研究院金属多孔材料国家重点实验室,陕西西安710016

出　　处：《过滤与分离》2015年第3期6-9,共4页Journal of Filtration & Separation

基　　金：陕西省科技统筹创新工程计划资助项目(2014KTCQ01-18)

摘　　要：采用过滤精度为1微米的金属微孔膜,在多晶硅合成气工艺环节进行了应用研究,结果表明经过金属微孔膜过滤后,合成气内的粉尘含量可以降至40 mg/cm3,对于大于1微米的粉尘颗粒具有显著的拦截效果,经过再生,金属微孔膜过滤系统的可以在过滤压差小于25 KPa下运行。Abstract： A metal microporous membrane with filtration accuracy of 1 micron was used in the process of polysilicon synthesis gas for application research. The results showed that after the metal microporous membrane filtration, the dust content of the synthetic gas could be reduced to 40mg/cm3,and it had significant intercepting effect for dust particles larger than 1 micron. After regeneration, the metal microporous membrane filtration system could be operated under the filter pressure difference of less than 25KPa.

关 键 词：金属微孔膜 多晶硅合成气 再生 应用研究 

分 类 号：TQ028.8[化学工程]