ZnO基透明导电膜研究热点与发展趋势分析  

The research highlights and development tendencies of ZnO based transparent conductive films

作　　者：李佳[1] 杨晔[1] 朱科[1] 魏铁锋[1] 王木钦 朱超挺[1] 宋伟杰[1,2] 

机构地区：[1]中国科学院宁波材料技术与工程研究所,宁波315201 [2]江苏省光伏科学与工程协同创新中心,常州213164

出　　处：《中国科学：技术科学》2015年第9期941-950,共10页Scientia Sinica(Technologica)

基　　金：浙江省自然科学基金(批准号:LY15F040004)资助项目

摘　　要：在简要论述Zn O基透明导电膜发展现状基础上,重点讨论近年来Zn O薄膜的最新研究热点,包括在提高迁移率和载流子浓度、功函数、光学特性及表面形貌调控、湿热稳定性、柔性导电膜及超薄高性能薄膜制备等方面的最新研究动态.同时,分析了透明导电薄膜技术的应用及发展趋势,为实现Zn O基透明导电薄膜在薄膜太阳能电池、平板显示器等领域的实际应用提供理论依据与实验参考.In this paper, we report the lastest research highlights of ZnO based transparent conductive film, emphasizing especailly on the lastest research achievements about the improvement of mobility and carrier concentration, the control of work function, durability, optical and electrical properties, and the preparation of flexible and high-quality ultra-thin films. At the same time, the paper analysizes the application and development tendencies of transparent conductive films. The paper will afford some reference value in the field such as thin film solar cell and flat panel displays on theoretical and experimental level.

关 键 词：透明导电膜 ZNO 载流子浓度 迁移率 功函数 雾度 湿热稳定 柔性 超薄 

分 类 号：TB383.2[一般工业技术—材料科学与工程]