双质量硅微机械陀螺仪正交校正系统设计及测试  

Design and test on quadrature error correction system of dual-mass silicon MEMS gyroscope

作　　者：曹慧亮[1,2] 李宏生[3] 申冲[1,2] 石云波[1,2] 刘俊[1,2] 杨波[3] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]中北大学电子测试技术国防科技重点实验室,太原030051 [3]东南大学仪器科学与工程学院,南京210096

出　　处：《中国惯性技术学报》2015年第4期544-549,共6页Journal of Chinese Inertial Technology

基　　金：总装预研基金项目(9140A09011313JW06119);江苏省科技攻关项目(BE2014003-3);国家杰出青年科学基金(51225504);国防973(2012CB723404);国家自然科学基金委员会;中国工程物理研究院联合基金资助(U1230114);中北大学校基金

摘　　要：为了减小正交误差对双质量硅微机械陀螺仪性能的影响,进一步提高陀螺精度和工程化成品率,对双质量结构正交耦合刚度校正法进行了研究。首先,针对双质量陀螺结构的特殊形式,分析了其左、右结构中正交耦合刚度不相等的原因,并结合相敏检测相位误差对正交耦合刚度值进行了计算,进一步量化了其对输出信号的影响;其次,结合正交校正梳齿结构介绍了耦合刚度校正法的工作原理,并基于左、右结构单独校正的方法设计了双质量结构正交校正控制系统;最后,对正交校正前后的双质量微机械陀螺仪进行了详细测试,结果证实了双质量单独校正比整体校正效果更好,各项参数均有较大提高,其中零偏稳定性从校正前的540(°)/h提高到了正交后的24.05(°)/h(1σ),证明了提出的两质量块单独校正方法的可行性和实用性。The quadrature-coupling stiffness correction method for dual-mass silicon MEMS gyroscope is investigated to reduce the quadrature error＇s influence and improve the gyro＇s precision and the finished product rate. Firstly, the unequal reason of the left and right masses＇ s coupling stiffness is analyzed based on the dual-mass structure, and the quadrature stiffness value is calculated taking into account the phase sensitivity demodulation error which contributes great error and drift to the gyro output. Secondly, a quadrature error correction comb is introduced, and a two-mass quadrature error separate compensation system is proposed. Finally, experiments are conducted to test the gyro performance, which show that the separate correction method has better result compared with the integral correction method, and the parameters are significantly improved after quadrature error correction, in which the bias stability is increased to 24.05（°）/h（1σ） from 540（°）/h, verifying the feasibility and practicality of the proposed method.

关 键 词：双质量硅微机械陀螺仪 正交误差 正交耦合刚度校正 两质量块单独校正 性能测试 

分 类 号：U666.1[交通运输工程—船舶及航道工程]