Profile and roughness of electrorheological finishing optical surfaces  

作　　者：Haobo CHENG Jingshi SU Yong CHEN Hon-Yuen TAM 

机构地区：[1]School of Optoelectronics, Joint Research Center for Optomechatronics Design and Engineering, Beijing Institute of Technology, Beijing 100081, China [2]Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Hong Kong, China

出　　处：《Frontiers of Optoelectronics》2015年第3期306-313,共8页光电子前沿（英文版）

摘　　要：This paper focuses on the process of electrorheological （ER） finishing optical surfaces. Experiments on K9 mirrors were conducted. In one experiment, the operating distance was varied over 0.5-0.8 mm with the voltage at 2000 V. The maximum peak-to-valley （PV） reduction was obtained at the distance of 0.5 ram, where the PV value was reduced from 58.71 to 25.03nm. In another experiment, the voltage was varied over 1500- 3000V with operating distance at 0.5mm. The final surface roughness （Ra） achieved was as low as 2.5 rim. A higher voltage produced a higher relative reduction of the Ra. These experimental results validated the process.This paper focuses on the process of electrorheological （ER） finishing optical surfaces. Experiments on K9 mirrors were conducted. In one experiment, the operating distance was varied over 0.5-0.8 mm with the voltage at 2000 V. The maximum peak-to-valley （PV） reduction was obtained at the distance of 0.5 ram, where the PV value was reduced from 58.71 to 25.03nm. In another experiment, the voltage was varied over 1500- 3000V with operating distance at 0.5mm. The final surface roughness （Ra） achieved was as low as 2.5 rim. A higher voltage produced a higher relative reduction of the Ra. These experimental results validated the process.

关 键 词：electrorheological （ER） FINISHING surface roughness 

分 类 号：TG84[金属学及工艺—公差测量技术] TH740.6[机械工程—光学工程]