磁控溅射在PI/石墨烯基体上制备氧化锌薄膜  

Preparation of ZnO films on graphene/PI substrate by magnetron sputtering

作　　者：刘思宁[1] 周艳文[1] 沙天怡 齐艳萍[1] 佟欣儒 王羽倩 吴法宇[1] 

机构地区：[1]辽宁科技大学材料与冶金学院,辽宁鞍山114051

出　　处：《辽宁科技大学学报》2015年第4期241-246,257,共7页Journal of University of Science and Technology Liaoning

基　　金：国家自然科学基金(51172101;51372109);辽宁省优秀人才项目(LR2012009);辽宁科技大学大学生创新创业项目(DC2014004)

摘　　要：聚酰亚胺(PI)/石墨烯复合薄膜兼备了可挠曲性及透明、导电性,可作为柔性透明导电电极用于柔性电子器件中。但附着于PI上的石墨烯易划伤,使其导电性变差。本文采用脉冲直流磁控溅射法,以PI/石墨烯为基体,镀制保护石墨烯的氧化锌薄膜。分别采用原子力显微镜、X射线衍射仪、台阶仪、霍尔效应仪及紫外-可见分光光度计检测PI/石墨烯/ZnO复合薄膜的表面形貌、晶体结构、薄膜厚度及导电、透光性能。结果表明,PI/石墨烯/ZnO复合薄膜结构致密,氧化锌以(002)为择优取向,最低方阻为1.9×104Ω/sq,略低于石墨烯的方阻,可见光区平均透光率达80%。Graphene is a new material with good conductivity and high transmittance,polyimide（PI） film is flexible. PI/graphene composite films are not only flexible,but also transparent and conductive. The conductivity of the PI/graphene is easily damaged due to scratch on the graphene surface. Zn O films were deposited onto the PI/graphene substrate by pulsed DC magnetron sputtering to protect the surface of graphene in this paper. A range of techniques,X- ray diffraction,atomic force microscope,step profile,Hall Effect measurement and UV-vis spectrophotometer,were used to determinate the structure,optical and electrical properties of the PI/graphene/Zn O films. The results showed that the sheet resistance of PI/ graphene/Zn O multilayer film was low down 1.9×104Ω/sq. The average transmittance of the PI/graphene/Zn O film was upto 85% within the visible wavelength.

关 键 词：PI/石墨烯/ZnO复合薄膜 脉冲磁控溅射 透明导电电极 

分 类 号：O484.4[理学—固体物理]