毫米级氟化钙盘腔的加工与测试  

Fabrication and test of millimeter-size CaF_2 disk resonator

作　　者：卢晓云[1] 薛晨阳[1,2] 王永华[1] 郑华[1] 杜建功[1] 张婷[1] 闫树斌[2] 唐军[2] 

机构地区：[1]中北大学电子测试技术重点实验室,山西太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《红外与激光工程》2015年第10期3049-3054,共6页Infrared and Laser Engineering

基　　金：国家自然科学基金杰出青年基金(51225504);国家自然科学基金(61275166)

摘　　要：回音壁模式(Whispering Gallery Mode,WGM)的光学谐振腔作为光学研究的重要工具具有广泛的应用前景。以超纯单晶氟化钙为材料加工了直径为5 mm,厚度为1 mm的Ca F2盘型腔,并用化学机械抛光法对其进行了光学抛光,得到了粗糙度为纳米级别的CaF2盘型腔。搭建盘腔与锥形光纤的耦合测试平台测试所加工盘型腔的光学性能,测得在波长为1 550 nm时所加工的盘型腔的品质因数为2.1×106。对CaF2盘型腔损耗机制进行了理论分析,提出了提高CaF2盘型腔品质因数的方法。Whispering gallery modes （WGM） optical resonators is an important tool for optical research with broad application prospects. A CaF2 disk resonator was fabricated with ultra-pure single crystal of calcium fluoride characterized by the diameter of 5 mm and thickness of 1 mm. The CaF2 disk resonator was polished with chemical mechanical polishing method and nanometer-scale roughness was achieved. The coupling test platform of disk resonator and tapered fiber was set up to test the optical properties of the resonator. The test results showed that CaF2 optical resonator characterized by the quality factor Q= 2.1×10^6 at λ=1 550 nm. The loss mechanisms of the resonator was analyzed and the method to improve quality factor of the CaF2 resonator was proposed.

关 键 词：光学谐振腔 CaF2盘型腔 光学抛光 粗糙度 品质因数 

分 类 号：TN202[电子电信—物理电子学]