基于PDMS的自组装制备可调谐光栅的研究  

Study on Tunable Optical Gratings Based on Self-Assembly of PDMS

作　　者：马宏宇[1] 杨秋翔[1] 

机构地区：[1]中北大学计算机与控制工程学院,山西太原030051

出　　处：《压电与声光》2015年第5期847-850,854,共5页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金(91123016;51225504;51105345);国家973计划前期(2012CB723404)

摘　　要：传统方法制作可调谐光栅的制作工艺复杂,成本高,时间长,因此,该文提出了一种新型的基于聚二甲基硅氧烷(PDMS)可调谐光栅法,通过氧等离子体法制作出微米尺度的光栅结构。利用等离子体时间的可控性和PDMS的优异弹性,通过调控等离子体的时间和PDMS的拉伸程度的(最大可拉伸120%),制得所需尺寸光栅。将制得的光栅薄膜沿光栅栅线方向拉伸,随着栅线的伸长,光栅常数随之变小,从而对光栅周期进行连续、任意调谐,并获得预定的目标周期。实验表明,制作的光栅可调谐范围可达40%,且调谐过程中金属光栅保持完整,衍射角变化明显,理论值与实验值基本吻合,取得了预期的实验效果。实验结果表明,提出的新型可调谐光栅制作成本和周期降低,工艺制作过程较简单,且易控制。Because conventional method for tunable grating fabrication has harsh process condition,complex fabrication process,high costs and long cycle,a novel PDMS-based approach for fabrication of a tunable grating is introduced in this paper.By an oxygen plasma method to produce a micron scale grating structure,and making.Use of plasma free time controllability and excellent elastic of PDMS（maximum tensile was 120%）,the desired grating can be obtained.Then by stretching the film along the grating line,as the grating line elongating,the grating constant decreases,the grating′s spatial period could be continuously varied and can obtain a predetermined target period.Experimental results show that the production of a grating tunable range is up to 40%,and the tuning process to maintain the integrity of the metal grating and diffraction angle varies significantly,the theoretical values and experimental values are basically the same.The experiment verified this method for adjustable grating fabrication has advantages of low cost,short cycle,simple process and easy to control,so it can be widely used in micro-spectrometer,scanners,optical communications and other fields.

关 键 词：氧等离子体 聚二甲基硅氧烷(PDMS) 可调光栅 周期 光栅常数 

分 类 号：TM211[一般工业技术—材料科学与工程] TH706[电气工程—电工理论与新技术]