掺TiO_2的SnO_2丙酮气敏元件的制作及其灵敏度测试  

Fabrication method and sensitivity test of TiO_2-doped SnO_2 thin-film acetone sensor

作　　者：孙冰[1] 田丰[2] 汪鹏[2] 高金雍[2] 

机构地区：[1]天津计量监督检测科学研究院,天津300192 [2]河北工业大学,天津300401

出　　处：《传感器世界》2015年第10期21-25,共5页Sensor World

摘　　要：简单介绍了掺TiO2的SnO2簿膜丙酮气敏元件的制作，重点分析不同的掺杂溅射镀膜时间、不同加热电压对灵敏度的影响。对不同有机蒸气进行选择性测试，发现掺TiO2的SnO2薄膜气体传感器对丙酮有很高的灵敏度，而且输出信号与丙酮气体浓度成正比，浓度低至100ppm也可检测试出来。测定了元件的工作温度与加热电压的关系，发现加热电压为6～7V，相当于元件的工作温度为250～300℃时，对不同气体的灵敏度都很高。The fabrication of TiO2-doped SnO2 thin-film aceetone sensor is descried briefly. The emphasis is on the influences of different doping sputtering times and heatingvoltages on sensitivity. The selective tests are done on different organic vapors and show that TiO2-doped SnO2 thin-film gas sensor has high sensitivity to acetone with the output signal is proportional to the concentration of acetone gas even if concentration is as low as 100ppm. The relationship between working temperature and heating voltage is determined. It is found that sensitivities of different gases are very high at 6-7V heating voltage, which is equivalent with 250~300℃ working temperature.

关 键 词：丙酮传感器 溅射镀膜 掺TiO2的SnO2 薄膜 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]