4臂边缘驱动变形镜校正低阶像差的仿真计算  

Simulation and Calculation of Low Order Aberration Corrected by Four-Arm Edge-Driven Deformable Mirror

作　　者：刘李辉[1] 龙吟[2] 曹芬[1,3] 刘文智[1] 房勇[1] 刘文广[3] 

机构地区：[1]西北核技术研究所,陕西西安710024 [2]中国人民解放军乌鲁木齐总医院,新疆乌鲁木齐830000 [3]国防科技大学,湖南长沙410073

出　　处：《中国激光》2015年第10期248-258,共11页Chinese Journal of Lasers

摘　　要：围绕未来固态大功率激光系统中低阶像差补偿的需求,开展了边缘驱动变形反射镜的优化设计和仿真分析。提出了4臂边缘驱动变形镜设计结构,并建立了仿真模型,以变形镜拟合残差面形的均方根(RMS)值和峰-谷(PV)值为目标,分析了不同结构参数对变形镜校正低阶像差能力的影响。根据对离焦、像散和彗差校正拟合残差面形的RMS值和PV值随结构参数变化的曲线,确定了变形镜的最佳设计参数并给出了该参数下拟合离焦、像散和彗差的残差面形RMS值和PV值。对于PV值分别为20、10、10μm的离焦、像散和彗差,拟合残差面形RMS值和PV值分别为0.2366μm和1.3762μm、0.0112μm和0.1146μm以及0.1606μm和0.9773μm。以上结果表明,设计的4臂边缘驱动变形镜的校正效果符合设计要求。Based on the need of compensating middle and low order aberrations which lie in solid high power laser system in the future, optimal design and simulation analysis about edge-driven mirror are done. The design frame of four-arm edge-driven mirror is put forward, and the simulation model is built. Aimed at the residual error root mean square（RMS） and peak to valley（PV） value, the influence of structural parameters on the performance of correcting low order aberration is analyzed. According to the residual error RMS and PV value curve of correcting focus astigmatism, coma with structural parameters changing, the optimal parameters of the model are chosen and corresponding residual error RMS and PV values are shown. The simulation and calculation results show that for focus at 20 mm, astigmatism at 10 mm and coma at 10 mm of PV, the residual error correcting focus, astigmatism and coma are 0.2366 mm of RMS and 1.3762 mm of PV, 0.0112 mm of RMS and 0.1146 mm of PV and 0.1606 μm of RMS and 0.9773 mm of PV, respectively. These data prove that correction performance of four- arm edge- driven deformable mirror satisfies the demand of design.

关 键 词：自适应光学 边缘驱动变形镜 低阶像差 仿真模拟 

分 类 号：O436[机械工程—光学工程]