磁控溅射制备Au纳米颗粒及其局域表面等离激元共振特性研究  

Preparation of Au Nanoparticles by Magnetron Sputtering and Study on Its Localized Surface Plasmon Resonance

作　　者：董大银 潘傲秋 李培刚[1] 沈静琴[1] 王顺利[1] 李超荣[1] 

机构地区：[1]浙江理工大学光电材料与器件中心,杭州310018

出　　处：《浙江理工大学学报（自然科学版）》2015年第6期882-886,共5页Journal of Zhejiang Sci-Tech University(Natural Sciences)

基　　金：国家自然科学基金项目(61274017);浙江省大学生科技创新活动计划(2014R406083);浙江理工大学521人才计划;浙江省钱江人才计划(QJD1202004);浙江省科技厅公益性技术应用研究计划项目(2014C37073)

摘　　要：通过磁控溅射的方法在石英衬底上沉积了Au薄膜,经过热退火处理形成了不同表面形貌和尺寸的Au纳米颗粒。通过XRD、AFM和紫外可见光谱研究了薄膜的质量、表面形貌、尺寸和光谱特性,分析了不同表面形貌和尺寸的Au纳米颗粒对局域表面等离激元共振的影响。研究表明:随着退火温度的升高,Au薄膜由各向异性的蠕虫状结构逐渐变成规则的纳米颗粒,退火温度越高,Au纳米颗粒越接近于圆形,颗粒间距越大,导致局域表面等离激元共振峰位发生蓝移,半峰宽变窄;另外溅射时间对Au纳米颗粒的影响也很大,随着溅射时间的增加,颗粒尺寸变大,变得不再均匀,局域表面等离激元共振峰发生红移、宽化和向长波段上扬。Au films were deposited on the quartz substrate by magnetron sputtering,and Au nanoparticles with different surface morphologies and sizes formed through thermal annealing treatment.The quality,surface morphology,size and optical properties of the nanoparticles were studied by X-ray diffraction,Atomic Force Microscope and Ultraviolet-Visible spectroscopy.The effects of morphologies and sizes on the localized surface plasmon resonance were studied.The results show that,with the increase in the thermal annealing temperature,Au films gradually change to regular nanoparticles from anisotropic wormlike structure;when the annealing temperature is higher,Au nanoparticles are closer to roundness;larger particle space results in blue shift of localized surface plasmon resonance peak position and narrow half-peak breadth.In addition,sputtering time also imposes great impacts on Au nanoparticles.As sputtering time rises,particle size increases and becomes on longer even.Red shift,broadening and lifting to long-wave band happen to localized surface plasmon resonance peak position.

关 键 词：Au薄膜 局域表面等离激元共振 热退火 表面形貌 

分 类 号：O531[理学—等离子体物理] O433.4[理学—物理]