低温制备针对KDP晶体的防潮双层宽带增透膜  

Low temperature synthesis of moisture-proof double-layer broadband anti reflection film for KDP crystals

作　　者：肖波凯 沈军[1] 李晓光[1] 王晓栋[1] 周小卫[1] 张清华[2] 

机构地区：[1]同济大学物理科学与工程学院上海市特殊人工微结构材料与技术重点实验室,上海200092 [2]成都精密光学工程研究中心,成都610041

出　　处：《化工新型材料》2015年第10期37-39,共3页New Chemical Materials

基　　金：国家自然科学基金委员会和中国工程物理研究院联合基金资助(U1230113)

摘　　要：在惯性约束聚变(ICF)装置中,大量使用有变频特性的水溶性磷酸二氢钾(KDP)类晶体材料,但KDP晶体需要有效的保护膜防止其潮解。由于KDP晶体元件晶相转变温度低,对湿度比较敏感,在很大的程度上限制了膜层制备和后处理工艺。以甲基三乙氧基硅烷(MTES)为原料,采用溶胶-凝胶技术和提拉方式制作防潮膜,仅仅以100℃以下温度进行热处理,再以正硅酸乙酯(TEOS)为原料,在镀有热处理后的防潮膜的基底上采用上述工艺镀制光学减反膜。对组合薄膜的防潮、光学性能、结构等进行了测试表征。结果显示防潮性能佳,而且在特定波长532nm有高达99.76%的透过率。薄膜中存在大量的甲基(—CH3),是性能优良的且能在较低的温度下进行制备的防潮增透膜,可用于三倍频晶体KDP的增透与保护。In inertial confinement fusion（ICF）devices,lots of the water soluble potassium dihydrogen phosphate（KDP）crystals with frequency conversion characteristics are used.Coatings can effectively protect the KDP crystals.But KDP crystals have low phase transition temperature,and are very sensitive to humidity.This restricts the film preparation and post treatment to a great extent,and has a greater negative impact on the performance,which are unable to meet the requirements of the devices.Methyltriethoxysilane（MTES）was applied as raw materials,moistureproof films were prepared by sol-gel technique and dip-coating method.Heat treatment was kept only under 100℃.Then using tetraethyl orthosilicate（TEOS）as raw materials,the outer layer anti-reflective coating was prepared on the heated moistureproof film by sol-gel process and dip-coating methodwith a heat treatment of 80℃.The moisture barrier properties,optical performance and the structure of films were characterized.The results showed that the films had good moisture resistances,and the transmittance at the wavelength of 532 nm was up to 99.76%.The films contained a large number of methyl（—CH3）,which was the main reason of the excellent property of moistureproof.The films can be applied to increase the transmittance and moistureproof of the triple frequency KDP crystal.

关 键 词：防潮 增透 MTES-TEOS双层膜 KDP晶体 溶胶-凝胶法 

分 类 号：TB383.2[一般工业技术—材料科学与工程]