MPCVD生长单晶金刚石及发射光谱分析  

Growth and Emission Spectra Analysis of Single Crystal Diamond by MPCVD

作　　者：吴超[1] 马志斌[1] 高攀[1] 黄宏伟[1] 付秋明[1] 王传新[1] 

机构地区：[1]武汉工程大学材料科学与工程学院湖北省等离子体化学与新材料重点实验室,武汉430073

出　　处：《人工晶体学报》2015年第10期2734-2738,共5页Journal of Synthetic Crystals

基　　金：国家自然科学基金(10875093)

摘　　要：在微波等离子体化学气相沉积(MPCVD)生长单晶金刚石过程中,测量了近衬底附近等离子体发射光谱(OES),研究了甲烷浓度对等离子体中基团谱峰强度的影响,分析了等离子体中基团谱峰相对强度与金刚石生长速率、质量的关系。利用激光拉曼光谱(Raman)和扫描电镜(SEM)对生长之后的单晶金刚石进行表征。结果表明:随着甲烷浓度的提高,Hα基团谱峰几乎不变,C2、Hβ、Hγ和CH基团谱峰强度均增加,而C2基团增加显著。同时,基团谱峰相对强度比值I(Hγ)/I(Hβ)、I(C2)/I(CH)和I(C2)/I(Hα)也都随着甲烷浓度的提高而增加。I(C2)/I(CH)比值的升高不利于单晶金刚石的生长。生长速率测试表明,单晶金刚石的生长速率随I(C2)/I(Hα)比值的增大而增加,当I(C2)/I(Hα)小于0.35时,生长速率呈现指数快速增加,超过这个值之后,增长趋势变缓,生长速率呈线性增加。The plasma emission spectroscopy in the process of plasma chemical vapor deposition was measured near the single crystal diamond growth using microwave substrate region. The influence of methane concentration on the species emission intensity was studied. The relationships of growth rate and quality of the homoexpiaxy diamond with the relative intensity of the different species were also analyzed. The grown single crystal diamond was characterized by Raman spectroscopy and SEM. The results show that the intensity of C2, Hβ, Hy and CH spectral line increase with the increasing of methane concentration and that the intensity of Hα almost dont change. Meanwhile, the relative intensity ratio of the I（ Hy ）/I（Hβ ） ,I（ C2 ）/I（CH） and I（ C2 ）/I （Hα） increases as the methane concentration increasing. Elevating the ratio of the I（C2 ）/I（CH） is harmful for the growth of single crystal diamond. Growth rate tests indicate that the growth rate increases with the ratio of I（C2 ）/l（ Hβ ）, the growth rate increases exponentially as l（ C2 ）/l（ Hα） increasing,while the increase trend becomes slow, the growth rate shows a linear increasing with the increasing of I（ C2 ）/I（ Hα ） when the ratio is over 0.35.

关 键 词：微波等离子体化学气相沉积 单晶金刚石 发射光谱 甲烷浓度 

分 类 号：O78[理学—晶体学]