HPAA对Q235钢在碱性溶液中的缓蚀性能研究  

Influence of Negative Bias on TiN Film Deposited by Multi-arc Ion Plating

作　　者：毛礼娜 殷超凡 陈启明[1,2,3] 宋沂泽 高原[1,2,3] 董中新 张焱[1,2,3] 彭凯[1,2,3] 王成磊[1,2,3] 

机构地区：[1]广西信息材料重点实验室,广西桂林541004 [2]桂林电子科技大学材料学院,广西桂林541004 [3]桂林广陆数字测控股份有限公司,广西桂林541004

出　　处：《表面技术》2015年第11期1-6,28,共7页Surface Technology

基　　金：国家自然科学基金资助项目（51264007）;国家自然科学基金青年基金（51201043）;广西科学研究与技术开发科技攻关计划（12118020-2-2-1）;广西信息材料重点实验室（桂林电子科技大学）资助（1210908-10-）;桂林电子科技大学一桂林电科院研究生联合培养基地专项经费资助（20121225-10-Z;20121225-03-Z）

摘　　要：目的 运用响应面分析法考察缓蚀剂2-羟基膦乙酸（HPAA）的缓蚀效果。方法 通过单因素灵敏度分析法考察p H值、HPAA的质量浓度、温度对Q235腐蚀的影响,确定取值范围。基于响应面优化分析法（RSM）,根据单因素实验结果,采用中心组合设计原则（CCD）对质量浓度、温度、p H值进行优化实验设计。以HPAA的缓蚀率为响应值,采用RSM对响应数值进行方程回归,对得到的二次关联模型进行优化,并将优化的参数条件应用于复配缓蚀剂进行SEM和EIS分析。结果 质量浓度、温度、p H值的优化取值范围分别为20～26 mg/L,45～55℃和8～10。RSM优化后,质量浓度为23 mg/L,温度为50℃,p H值为9.0时,HPAA的缓蚀率最优为68.68%。实验获得的缓蚀率为68.78%,与预测值偏差为0.15%。将优化的参数应用于缓蚀剂的复配,发现HPAA：Na2MOO4：Na2B4O7质量浓度的比为0.5：0.3：0.5时,复配的缓蚀剂用量最少且缓蚀率最高可达到93.75%。此复配缓蚀剂在SEM图中光亮无腐蚀,并且在EIS谱中表现出纯电容性,阻抗最大、缓蚀率最高。结论 响应面法和SEM,EIS结合运用在HPAA的缓蚀性能研究是可行、准确、可靠的。Objective In order to improve the comprehensive performance of TiN coatings, the appropriate negative bias was in- vestigated. Methods TiN coatings were deposited with different negative bias voltage on the surface of 4Cr13 stainless steel, and the effect of negative bias voltage on the surface quality, microstructure, hardness, binding force and friction coefficient of the coa- tings was investigated. Results The results showed that negative bias voltage had an obvious influence on the surface quality of the TiN coating. When the negative bias voltage was 0 V, there were many droplets, larger particles and a few pits. With the increase of the bias voltage, the number and size of droplets on the film surface were reduced, and the coatings surface became smooth and more compact. TiN films deposited at different bias voltage all showed preferred orientation in （ 111 ） crystal plane, but with the increase of bias voltage, the preferred orientation gradually diminished, when the bias voltage was 400 V, the peak value of the film on the （220） crystal plane was gradually strengthened. When the bias voltage changed between 0 V and 400 V, the hardness, fording force and abrasion resistance of coatings first increased and then decreased. When the bias voltage was 300 V, the biggest hardness and fording force reached 2650HV and 58 N, respectively; The friction coefficient and abrasion loss were 0.48 and 0. 1065 mm3 , respec- tively. Conclusion Applying proper negative bias voltage could improve the comprehensive properties of coatings, such as hardness, fording force and abrasion resistance. When the bias voltage was 300 V, the TiN film deposited showed the best properties.

关 键 词：HPAA 缓蚀剂 复配缓蚀剂 腐蚀率 缓蚀率 响应面法 优化 

分 类 号：TG174.444[金属学及工艺—金属表面处理]