V型和Z型电热微驱动器性能比较与分析(邀请论文)  

Performance Comparison and Analysis of V-and Z-shaped Electrothermal Actuators( Invited Paper)

作　　者：张绪平[1] 张卓[2] 

机构地区：[1]奥胡斯大学工程学院,奥胡斯工程学院,奥胡斯8000 [2]北京工业大学机械工程与应用电子技术学院,北京100124

出　　处：《北京工业大学学报》2015年第11期1636-1643,共8页Journal of Beijing University of Technology

摘　　要：提出一种用于V型和Z型电热微驱动器性能比较的拓扑结构和标准,建立了在真空工作环境下V型和Z型电热微驱动器系统分析与比较模型.有限元仿真分析和实验结果验证了分析模型的准确性和有效性.借助此分析模型及所提出的性能比较拓扑结构和标准,综合分析和比较了V型和Z型电热微驱动器随不同结构参数变化时输出位移和力性能,为V型和Z型电热微驱动器的合理选择、系统设计与分析提供了可靠和实用的指导.This paper presents a topological layout and benchmark that enables the systematic performance comparison between V- and Z-shaped electrothermal micro-actuators. A common analytical model of both V- and Z-shaped micro-actuators operating in vacuum conditions is established and verified by finite-element analysis and experimental results. Based on the analytical model and the proposed topological layout and benchmark, the performance of V- and Z-shaped actuators is compared in terms of output displacement and force with varying structural parameters, which provides a reliable and practical guidance on the reasonabe selection, systematic design, and analysis of the V- and Z-shaped electrothermal micro-actuators.

关 键 词：电热驱动器 微驱动器 拓扑结构 

分 类 号：TH122[机械工程—机械设计及理论] TH112