微尺度下速度滑移对空气静压导轨性能影响  

Effect of Velocity Slip on Performance of the Aerostatic Guideway in Micro-scale

作　　者：陈东菊[1] 周帅[1] 董丽华[1] 范晋伟[1] 

机构地区：[1]北京工业大学机械工程与应用电子技术学院,北京100124

出　　处：《北京工业大学学报》2015年第11期1688-1692,共5页Journal of Beijing University of Technology

基　　金：国家自然科学基金资助项目(51105005);北京市自然科学基金资助项目(3142005)

摘　　要：为了阐释空气静压导轨气膜间隙处在微小尺度所体现的特性,引入气体稀薄效应中的速度滑移算法到Navier-Stokes方程,推导出体现微尺度条件下空气膜流动特点的雷诺方程,进而对气膜内的压强分布进行了仿真分析,根据得到的压强分布计算气膜承载力和刚度随气膜厚度变化的规律,通过试验对得出的结论进行了间接验证,与分析结果吻合.The velocity slip calculation method which reflects the rarefied effect was introduced to the Naiver-stokes equation for interpreting the characteristics of aerostatic guideway gas film clearance in micro-scale. The Reynolds equation indicating the flow characteristics of gas film was derived. The pressure distribution of the gas film was simulated. The variation rules of the stiffness of the gas film were calculated with the pressure distribution. This was verified by experiments indirectly and agreeds with the analysis results.

关 键 词：微尺度 空气静压导轨 气膜波动 承载力 刚度 

分 类 号：TH161[机械工程—机械制造及自动化]