劈刀悬伸长度对超声声学系统振动特性的影响研究  

Effects of capillary overhang length on the vibration characteristics of ultrasonic acoustic system

作　　者：张云电[1] 冯刚[1] 

机构地区：[1]杭州电子科技大学机械工程学院,浙江杭州310018

出　　处：《机电工程》2015年第11期1418-1422,共5页Journal of Mechanical & Electrical Engineering

摘　　要：针对引线键合劈刀悬伸长度对声学系统谐振频率及劈刀刀尖振幅的影响等问题,推导出了换能器与变幅杆整体频率方程,建立了超声引线键合声学系统的有限元模型,开展了有限元模态分析,通过改变劈刀相对偏移量,得到了不同相对偏移量下对应的声学系统振动模态图、谐振频率和劈刀刀尖振幅,从而得到了相对偏移量与声学系统谐振频率及劈刀刀尖振幅的散点图及函数关系,在Agilent阻抗分析仪上对有限元分析结果进行了评价,进行了振动参数测试。研究结果表明,仿真结果和测试结果比较吻合,通过改变劈刀悬伸长度可以改变声学系统的谐振频率和刀尖振幅,当劈刀的悬伸长度为2 mm左右时,刀尖振幅达到最大,同时劈刀悬伸长度对于系统振动模态影响不大,且主模态与相邻模态相差较远,可有效避免系统频率混叠现象。Aiming at the problems of the effects of capillary overhang length on acoustic resonance frequency and capillary tip amplitude,the integral equation of transducer and amplitude transformer was pulled,and the finite element model of ultrasonic wire bonding acoustic system was built. The finite element modal analysis was investigated. The figure of system vibration mode,resonance frequency and capillary tip amplitude relative to different relative offset were obtained. Thus scatter charts of relative offset with resonance frequency of acoustic system and relative offset with capillary tip amplitude were gotten through changing the capillary relative offset. At the same time the function relationship was set up. The finite element analysis results were evaluated on the Agilent impedance analyzer,the vibration parameters were tested. The results indicate that the simulation results are in agreement with the test results. Through changing the capillary overhang length,the resonant frequency and the tip amplitude of acoustic system can be changed. When the capillary overhang length is about 2 mm,the amplitude reaches the maximum. And the capillary overhang length has little effects on vibration mode of the system. Besides the adjacent modes are far away from the main mode which can effectively avoid aliasing.

关 键 词：有限元 超声引线键合 劈刀 振动特性 

分 类 号：TB533[理学—物理] TH113.1[理学—声学]