计算光栅零级衍射场的模态层吸收法  

Calculation of Zero-Order Diffraction by Using the Modal Slice Absorption Method for Gratings

作　　者：邓浩[1] 陈树强[1] 马磊[1] 

机构地区：[1]电子科技大学物理电子学院,成都610054

出　　处：《电子科技大学学报》2015年第6期851-857,共7页Journal of University of Electronic Science and Technology of China

基　　金：国家自然科学基金(61501094)

摘　　要：通过将严格耦合波分析的傅里叶展开过程与一种差分技术——层吸收法(SAM)的高斯消元迭代过程相结合,实现对任意复杂光栅零级衍射场的计算。在满足精度要求条件下,如果SAM所需网格数小于RCWA所需阶梯近似层数的两倍左右,SAM更高效;对于示例结构,相对于RCWA,SAM最高可以减少40%的计算时间。因此该方法具有辅助应用于集成电路纳米量级微结构分析/测试的价值。The rigorous couple wave analysis （RCWA） is widely used in structure analysis/testing of integrated circuit （IC）, in particular, efficient for gratings with vertical sidewalls. But for a complex grating, its efficiency is reduced due to the staircase approximation. Here we present a rapid calculation method of O＇s order diffraction field for arbitrary grating, which combines RCWA with the slice absorption method （SAM）. Under a given accuracy requirement, when the girds needed by SAM are less than double of the staircase approximation slices needed by RCWA, the SAM is more efficient. In the numerical examples, a calculation time up to 40% of RCWA is reduced by SAM. Therefore, SAM could be the auxiliary method to RCWA in the nanoscale IC application.

关 键 词：衍射 光栅 测试 严格耦合波分析 层吸收法 

分 类 号：O436.1[机械工程—光学工程]