1MΩ～100GΩ高值电阻器高精度的校准方法  

A High Accurate Calibration Method for High Value DC Resistor 1MΩ～100GΩ

作　　者：王一帮[1] 郑世棋[1] 梁法国[1] 乔玉娥[1] 刘霞美 

机构地区：[1]中国电子科技集团公司第十三研究所,河北石家庄050051

出　　处：《宇航计测技术》2015年第5期54-56,69,共4页Journal of Astronautic Metrology and Measurement

摘　　要：高阻计、数字源表等仪器在半导体行业有着广泛的应用. 但目前市场上1MΩ-100GΩ高值电阻器准确度（±1. 0x10-3 -±1. 0x10-2）无法满足高阻计、数字源表等仪器电阻参数的溯源需求. 本文提出了一种高精度的高值电阻器的校准方法,该方法由两个多功能校准源和指零仪组成的比较电桥实现. 根据校准方法组建了1MΩ-100GΩ测量系统,测量结果的不确定度为3. 0x10-5 -8. 0x10-4,可满足市场上绝大部分高阻测量仪器的校准需求.High resistance meter and digital source-meter have a wide application in semiconductor industry. But commercial high value resistance whose accuracy is （±1. 0x10-3 -±1. 0x10-2） cannot meet the need of traceability of resistance parameter for high resistance meter and digital source-meter. The paper demonstrates a high accurate calibration method for commercial high value dc resistor, realized by a comparator bridge composed of two multifunctional calibrated voltage source and a zero-current-me-ter. A calibrated system is set based on the method, and the measurement uncertainty is 3. 0x10-5 -8. 0 x10-4 , whose accuracy can meet the calibration need of most of high resistance measurement instrument.

关 键 词：高值电阻器 校准方法 高阻计 比较电桥 

分 类 号：TB971[一般工业技术—计量学]