可见光拓展InP/InGaAs宽光谱红外探测器  

Visible-extended InP/InGaAs wide spectrum response infrared detectors

作　　者：史衍丽[1] 郭骞[1] 李龙[1] 邓功荣[1] 杨绍培 范明国[1] 刘文波[1] 

机构地区：[1]北方夜视科技集团有限公司,云南昆明650223

出　　处：《红外与激光工程》2015年第11期3177-3180,共4页Infrared and Laser Engineering

基　　金：云南省重点基金(2015FA040)

摘　　要：由于标准InP/In0.53Ga0.47As短波红外探测器的响应波段为0.87~1.7μm,在高性能夜视中具有重要的应用。为了进一步利用夜天光在可见光区间的辐射能量,需要将InP/In0.53Ga0.47As短波探测器的光谱响应拓展到可见光,从而实现包含可见光和短波波段的宽光谱探测。通过特殊的材料设计和背减薄工艺,成功研制了可见光拓展的320×256 InP/InGaAs宽光谱红外探测器。采用增加滤光片的方法完成了器件在可见光、短波的成像演示,结果表明：目标在可见光、短波波段呈现出不同的特征信息,而不加滤光片的可见光拓展InP/InGaAs宽光谱红外探测器则探测到两个波段的信息,既包含目标的可见光信息同时也具有短波信息,从而实现了可见/短波双波段探测的效果,可显著提升对目标的探测能力。Standard InP/In0.53Ga0.47As short wavelength detectors has important application in high performance night vision owing to special spectrum response from 0.87 to 1.7 μm. In order to fully utilize the visible irradiation energy of night sky glow, the response wavelength can be extended to visible with the standard InP/In0.53Ga0.47As detector. By combining material structure design and substrate thinning processing technology, 320 ×256 visible-extended InGaAs wide spectrum detector were successfully prepared. Based on the detector, imagery demonstration was finished with different band filters. Different characterized information for the same target were indicated by detecting via short wavelength and visible filter respectively, at the same time, both visible and short wavelength information were obtained by wide spectrum detecting without band filter, the imagery behaved as visible and short wavelength dual band detecting. Consequently, target information and the recognition rate for the target will be improved dramatically by the visible-extended wide spectrum detector.

关 键 词：InP/In0.53Ga0.47As 光谱响应 可见光拓展 可见/短波 双波段探测 

分 类 号：TN215[电子电信—物理电子学]