Microscopic mechanical characteristics analysis of ultranano-crystalline diamond films  

超纳米金刚石薄膜的显微力学性能表征（英文）

作　　者：丰杰 谢友能 李周[1] 吴先哲[3] 李建国[2] 梅军[2] 余志明[1] 魏秋平[1,3] 

机构地区：[1]中南大学材料科学与工程学院,长沙410083 [2]中国工程物理研究院总体工程研究所,绵阳621900 [3]中南大学粉末冶金国家重点实验室,长沙410083

出　　处：《Transactions of Nonferrous Metals Society of China》2015年第10期3291-3296,共6页中国有色金属学报（英文版）

基　　金：Projects(51301211,21271188)supported by the National Natural Science Foundation of China;Project(2010A0302013)supported by the Foundation of China Academy of Engineering Physics;Project(ZZ13005)supported by the Foundation of Laboratory of Ultra Precision Manufacturing Technology of China Academy of Engineering Physics;Project(2012M521541)supported by the China Postdoctoral Science Foundation;Project(20110933K)supported by the State Key Laboratory of Powder Metallurgy,China;Project(CSU2013016)support by and the Open-End Fund for Valuable and Precision instruments of Central South University,China

摘　　要：The microscopic mechanical characteristics of ultranano-crystalline diamond films which were prepared in four different atmospheres were investigated for the applications in microelectron-mechanical system（MEMS）.The loading-unloading curves and the change of modulus and hardness of samples along with depth were achieved through nanoindenter.The results show that the films which are made in atmosphere without Ar have the highest recovery of elasticity,hardness（72.9 GPa） and elastic modulus（693.7 GPa） among the samples.Meanwhile,samples fabricated at a low Ar content have higher hardness and modulus.All the results above demonstrate that atmosphere without Ar or low Ar content leads to better mechanical properties of nanodiamond films that are the candidates for applications in MEMS.研究4种不同气氛下制备的可应用于MEMS方面的超纳米金刚石薄膜的显微力学特征。利用纳米压痕技术得到样品的加载-卸载曲线及硬度和弹性模量随压入深度的变化关系。结果表明,无Ar条件下制备的薄膜具有最好的弹性回复能力、最高的硬度(72.9 GPa)和弹性模量(693.7 GPa)。同时低Ar含量更有利于提高薄膜的硬度和弹性模量。以上结果说明无Ar或低Ar含量更有利于提高纳米金刚石薄膜的力学性能,以更好地应用于MEMS方面。

关 键 词：ultranano-crystalline diamond film NANOINDENTATION mechanical properties microelectron-mechanical system（MEMS） 

分 类 号：TQ163[化学工程—高温制品工业] TB383.2[一般工业技术—材料科学与工程]