Properties of W/DLC/W-S-C composite films fabricated by magnetron sputtering  

磁控溅射W/DLC/W-S-C复合膜的制备及其性能（英文）

作　　者：代明江[1,2,3] 韦春贝[2,3] 周克崧[1,2,3] 朱敏[1] 侯惠君[2,3] 林松盛[2,3] 佟鑫[2,3] 

机构地区：[1]华南理工大学材料科学与工程学院,广州510640 [2]广州有色金属研究院新材料研究所,广州510650 [3]广州有色金属研究院现代材料表面工程技术国家工程实验室,广州510650

出　　处：《Transactions of Nonferrous Metals Society of China》2015年第9期3002-3011,共10页中国有色金属学报（英文版）

摘　　要：A kind of W/DLC/W-S-C composite film was fabricated by magnetron sputtering method.Effects of WSx content on the structure and the adhesion of the composite films were investigated.In addition,tribological behavior of the composite films was studied in the conditions of the ambient air and N2 gas atmosphere by ball-on-disk tester.The results indicate that the composite films show dense and amorphous microstructure.The WCx and WSx compounds are found in amorphous diamond like carbon matrix in the top layers of W-S-C.A proper WSx content is beneficial for improving the adhesion of the composite films.In air atmosphere,the composite films with high C content have better wear resistance and the friction coefficients range from 0.15 to 0.25.In N2 condition,high WSx content is benefit for the wear resistance and the friction coefficients of the composite films range from 0.03 to 0.1.采用磁控溅射方法制备W/DLC/W-S-C复合膜,研究不同WSx含量对复合膜结构和结合强度的影响;采用球-盘式摩擦试验仪研究复合膜在大气环境以及氮气环境下的摩擦磨损性能。结果表明：复合膜结构致密,在非晶类金刚石基质中存在WSx和WCx化合物。合适的WSx含量有利于提高复合膜的膜/基结合强度。在大气环境下,随着C含量的增加复合膜的耐磨性能提高,其摩擦因数在0.15~0.25之间;在氮气环境下,随着WSx含量的增加复合膜的耐磨性能提高,其摩擦因数在0.03~0.10之间。

关 键 词：W/DLC/W-S-C composite film magnetron sputtering adhesion strength friction coefficient 

分 类 号：TB383.2[一般工业技术—材料科学与工程]