基于椭偏成像光路和表面等离子体共振效应的金属薄膜参数测量方法研究  

Measurement Method of Film Parameters of Metal Based on Imaging Ellipsometry and Surface-Plasmon Resonance

作　　者：胡仕玉 曾爱军[1,2] 谷利元 黄惠杰[1,2] 胡国行[1,2] 贺洪波[1,2] 

机构地区：[1]中国科学院上海光学精密机械研究所,上海201800 [2]中国科学院大学,北京100049

出　　处：《中国激光》2015年第11期162-167,共6页Chinese Journal of Lasers

基　　金：国家国际科技合作项目(2012DFG51590;2011DFR10010);国家科技重大专项(2011ZX02402)

摘　　要：提出了一种基于椭偏成像光路和表面等离子体共振效应的金属薄膜参数测量方法,在椭偏成像光路中采用p偏振光在金属薄膜与空气界面产生表面等离子体共振效应,利用不产生表面等离子体共振效应的s偏振光消除背景光的影响,得到表面等离子体共振吸收环垂直方向的归一化反射率曲线,数值拟合获得待测金属薄膜的薄膜参数,这种方法不需要求解椭偏方程,数据处理过程简单,求解速度快。实验中,基于该方法的测量结果与标准椭偏仪的测量结果基本一致,很好地验证了该方法的有效性。A measurement method of film parameters of metal based on imaging ellipsometry and surface-plasmon resonance is presented, p polarized light is applied to generate surface-plasmon resonance effect at the interface of metal film and air in layout of imaging ellipsometry. The influence of back light is avoided by s polarized light which can＇t lead to surface-plasmon resonance effect. Then the normalized reflectance profile along the perpendicular direction of absorption ring of surface-plasmon resonance is obtained. We measure metal film parameters by numerical fitting the reflectance profile along long axis of the elliptical fringe. This method is not necessary to solve the transcendental equation and data processing is simple and fast. The experimental result with this method is coincident with that of standard ellipsometer, which verifies the validity of this measurement method.

关 键 词：测量 金属薄膜参数 表面等离子体共振效应 椭偏成像光路 

分 类 号：O439[机械工程—光学工程]