“微电子器件”实验教学改革与探索  

作　　者：陈卉[1] 文毅[1] 张华斌[1] 胡云峰[1] 

机构地区：[1]电子科技大学中山学院电子信息学院,广东中山528402

出　　处：《高教学刊》2016年第1期118-118,120,共2页Journal of Higher Education

基　　金：电子科技大学中山学院教研基金(ZJY201501-35)资助

摘　　要：微电子器件作为电子科学与技术专业的核心课程,是学生学习理解后续专业课程的基础。为了符合学院应用型人才培养模式的需求,笔者对传统实验教学进行了改革,引入TCAD仿真软件进行实验教学,学生能形象直观的了解器件的制作流程及器件制备过程中相关参数对器件电学,光学性能的影响;带学生参观电子薄膜与集成器件国家重点实验中山分室,了解有机器件的制备测试流程。微视频,翻转课堂教学模式的引入,不仅提高了学生主动学习课程的积极性,也促进学生更好的理解课程的理论教学内容。As a core curriculum of Electronic Science and Technology, microelectronic device is the foundation of learning subsequent professional courses. According to the requests of the personnel training mode of college, the writ- er trys to reform traditional experimental teaching, introduce TCAD simulation software for experimental teaching so that students can visually understand the production process of the device and effect of device parameters on device electrical and optical properties; The writer brings students to visit Electronic Thin Films and Integrated Devices-State Key Laboratory of Zhongshan branch office to learn preparation and testing process of organic devices. The introduction of micro-video and flipped classroom teaching mode not only increases the enthusiasm of students in active learning course, but also promotes a better understanding of the theoretical teaching.

关 键 词：综合性实验 工艺流程 器件结构 软件仿真 有机器件 

分 类 号：G642[文化科学—高等教育学]