电视测角仪光学系统复合薄膜的研制  

Study and Fabricate of TV Goniometry Optics Composite Film

作　　者：付秀华[1] 熊仕富[1] 刘冬梅[1] 张静[1] 潘永刚[1] 

机构地区：[1]长春理工大学光电工程学院,长春130022

出　　处：《光子学报》2015年第11期71-76,共6页Acta Photonica Sinica

基　　金：吉林省重大科技攻关专项(No.20140203002GX)资助~~

摘　　要：为了提高电视测角仪光学系统的性能,满足电视测角仪在测量导弹偏离瞄准线的角偏差和转动角速度中的要求,在设计中使用薄膜技术.依据光学薄膜设计理论,采用金属-介质组合结构设计了宽光谱分光膜和内反射膜,解决了宽光谱光束倾斜入射时产生的偏振分离问题;通过优化沉积工艺参量、离子辅助参量以及真空退火处理,解决了内反射膜的脱膜问题.实验测试满足系统使用要求,并通过了国军标的相关环境测试.Applying TV goniometry to measure the angle deviation and rotation angular velocity of missile deviated from the line of sight,and it has the advantage of high precision and low bias.Using of thin-film technology to improve performance of TV goniometry optical system is a more effective method.Based on the thin-film design theory,and metal-medium structure was used to design broad spectrum splitter film and internal reflecting film.This method solves the problem of polarization separation when a wide spectrum incident obliquely.By optimizing the deposition process and ion-assisted parameters,using vacuum annealing method to solve the problem of internal reflecting film stripping.After testing,the prepared film meets the requirement of the system and passes the relevant environmental tests of national military standard.

关 键 词：薄膜 分光膜 内反射膜 偏振分离 真空退火 

分 类 号：O484[理学—固体物理]