纳米压入测试中面积函数测量方法综述  

Measurement Methods of Area Function for Nanoindentation Test

作　　者：任冬梅[1] 万宇[1] 段小艳[1] 

机构地区：[1]中航工业北京长城计量测试技术研究所,北京100095

出　　处：《计测技术》2015年第5期10-14,共5页Metrology & Measurement Technology

基　　金：国家科技支撑计划(2011BAK151307)

摘　　要：在纳米压入法材料力学性能测试中,面积函数的准确测量对保证测量结果的准确性非常重要。本文对纳米压入测试中常用的面积函数确定方法进行了分类介绍,并对各种方法的特点进行了分析,指出了为提高纳米硬度和弹性模量等力学性能参数的测量准确性对面积函数进行校准的必要性。Accurate measurement of the area function is very important in measuring mechanical properties of materials by nanoindentation method. The commonly used methods for determining the area function in nanoindentation test are introduced. The characteristics of the various methods are analyzed. It is pointed out that the calibration of area function is necessary for improving the measurement accuracy of hardness and e-lastic modulus.

关 键 词：纳米压入 面积函数 测量 

分 类 号：TB93[一般工业技术—计量学]