扫描电子显微镜在无机材料表征中的应用  

Application of scanning electron microscope in inorganic materials characterization

作　　者：杨志远[1] 杨水金[1] 

机构地区：[1]湖北师范学院化学化工学院,湖北黄石435002

出　　处：《湖北师范学院学报（自然科学版）》2015年第4期56-63,共8页Journal of Hubei Normal University(Natural Science)

基　　金：湖北省自然科学基金重点项目(2014CFA131)

摘　　要：扫描电子显微镜(SEM)是观察无机材料的形貌和结构的重要工具之一,在材料科学等众多领域中得到广泛的应用。作为一种先进的测试技术手段,SEM技术已经为材料学的研究提供了有价值的资料,大大地推动了无机合成的快速发展。简单地介绍了扫描电子显微镜的工作原理,并综述了SEM技术在材料学中表面形貌分析、断口分析、显微组织观察等方面的应用,SEM和EDS(X射线能谱仪)技术联用可以对化学成分定量分析,最后提出了SEM技术在材料学的应用展望。Scanning electron microscope （SEM） is one of the important tools to observe the morphology and structure of inorganic materials, and it is widely used in many fields such as materials science and so on. As an advanced testing technology, SEM technology has provided valuable information for the research of materials science, which greatly promoted the rapid development of inorganic synthesis. In this paper, the working principle of scanning electron microscope is briefly introduced. The surface morphology analysis, fracture analysis and microstructure observation of SEM technology were summarized. SEM and EDS technology combined can quantitative analysis of chemical composition. The application prospect of SEM technology in materials science was put forward at last.

关 键 词：扫描电子显微镜 无机合成 无机材料 应用 

分 类 号：TP302.7[自动化与计算机技术—计算机系统结构]