钯铬合金薄膜型氢气传感器的设计与制作  

Design and Fabrication of The Thin Film Pd/Cr Alloys Hydrogen Sensor

作　　者：张建国[1] 景涛[1] 曾固[2] 钱力[2] 宋祖殷 

机构地区：[1]中国电子科技集团公司第四十八研究所,湖南长沙410111 [2]航天医学工程研究所,北京100094 [3]空军驻湖南军代室,湖南长沙410110

出　　处：《电子工业专用设备》2015年第9期1-4,34,共5页Equipment for Electronic Products Manufacturing

摘　　要：采用钯铬合金做为氢敏材料,设计制备了集成铂薄膜加热器和测温器的氢气传感器。对不同环境温度下温度补偿后氢气传感器的响应特性进行了测试,测试结果表明铂加热器和测温器可消除环境温度对氢气传感器的影响;并研究了不同补偿温度下氢气传感器的响应特性,结果表明,随着补偿温度的升高,传感器吸氢速率和脱氢速率增加。The paper reports a hydrogen sensor using Pd/Cr sensing material; a temperature detectorand heater were included on the sensor for temperature control. We studied the response characteristicsunder different ambient temperatre, the rest result indicate that the heater can eliminate the influenceof the ambient temperature, and the sensor has better response characteristic; also studied the responsecharacteristics under different compensation temperature, as temperature increased, the rate ofhydrogen absorption and dehydrogenation increased

关 键 词：钯铬合金 薄膜 氢气传感器 

分 类 号：TN451[电子电信—微电子学与固体电子学]