硅基磁性纳米SiO_(2)微球的制备与表征  

Preparation and Characterization of Silicon-Based Magnetic Nano-SiO_(2) Microspheres

作　　者：叶子[1] 林文章[1] 李凡[1] 赵俊杰[1] 林青[1] 

机构地区：[1]上海工程技术大学材料工程学院,上海201620

出　　处：《微纳电子技术》2015年第12期795-799,共5页Micronanoelectronic Technology

基　　金：上海高校青年教师培养资助计划资助项目(ZZGCD15033);上海工程技术大学大学生创新项目(cz1505001);上海工程技术大学校启动项目(校启2014-51);上海工程技术大学材料工程学院内涵建设项目(nhrc-2014-01-01)

摘　　要：采用Stober法,以Fe3O4为磁核,制备出粒径为250-300 nm的磁性SiO2-Fe3O4复合微球。详细介绍了Stober法制备微球的实验过程,并对所制得的复合微球做了X射线衍射（XRD）结构分析、扫描电子显微镜（SEM）形貌表征以及振动样品磁强计（VSM）磁性性能测试分析。此外,还在金属氧化物半导体（MOS）电容结构的基础上,结合SiO2-Fe3O4复合微球的独特结构,制作了一种新型电解液-二氧化硅-微球-半导体（ESSS）电容结构化学传感器,并在不同pH值溶液下,分别测试了ESSS电容的电容-电压（C-V）曲线,测试结果初步证实了ESSS电容结构用作化学传感器的可行性。With Fe3O4 as the magnetic core,the magnetic SiO2 composite microsphere with the diameter of 250-300 nm was prepared by the Stber method.The preparation process of the microsphere by the Stber method was introduced in detail,and the prepared composite microsphere were carried out the component analysis,morphology characterization and magnetic performance test analysis by X-ray diffraction（XRD）,scanning electron microscopy（SEM）and vibrating sample measurement（VSM）,respectively.Besides,based on the metal-oxide-semiconductor（MOS）capacitor structure,combined with the unique structure of the SiO2-Fe3O4 composite microsphere,the chemical sensor with a novel electrolyte-silica-sphere-semiconductor（ESSS）capacitor structure was prepared.The capacitance-voltage（C-V）curves of the ESSS capacitor in the solutions with different pH values were tested,respectively.The test results preliminarily prove the feasibility of the ESSS capacitor structure for a chemical sensor.

关 键 词：Stober法 室温磁性 SIO2微球 电解液-二氧化硅-微球-半导体(ESSS)电容 化学传感器 

分 类 号：TB383[一般工业技术—材料科学与工程]