三维纳米接触式测头结构设计与优化  

Structural Design and Optimization of Three Dimensional Nano- contact Probe

作　　者：查小娜 杨洪涛[1] 费业泰[2] 

机构地区：[1]安徽理工大学机械工程学院,安徽淮南232001 [2]合肥工业大学仪器科学与光电工程学院,安徽合肥230009

出　　处：《安徽理工大学学报（自然科学版）》2015年第4期40-44,共5页Journal of Anhui University of Science and Technology:Natural Science

基　　金：2014安徽理工大学科研资助项目(ZY1448)

摘　　要：采用螺旋片簧弹性支承和压阻元件作为测量三维测力敏感元件的新型接触式三维纳米测头,进行了纳米测头的结构设计,建立了测头系统的三维模型。为了提高测头的触测灵敏度,采用正交试验法设计实验方案,应用ANSYS仿真软件进行静力学和动力学仿真分析,对纳米测头的结构进行优化设计,确定测头的最优尺寸、弹性体支承结构的最优结构,并分析其静、动态特性。分析结果表明,所研制的三维纳米测头横向测量灵敏度达到13.99με/m N,Z向测量灵敏度达到5.90με/m N。测头各阶固有频率最低为1291.6 Hz,不易发生共振。测头响应和稳定时间不超过0.1 ms,具有很好的实时性和稳定性,可以用于纳米三坐标测量机的测量触发。A new kind of three dimensional nano - contact probe was introduced in the paper, whose measuring three dimensional strain sensitive element was made of spiral leaf spring elastic and piezoresistive element. The nano - probe structure and its 3D model were designed and established respectively. In order to improve the probe contacting and touching sensitivity, orthogonal experiment method was adopted to design the experiments. The statics and dynamics simulation analysis of the probe was processed by using ANSYS simulation software. The optimization design for the structure of nano probe was done to determine the optimal size of probe and optimal structure of elastic supporting. The static and dynamic characteristics of the developed nano probe were analyzed. The analysis results showed that the measurement sensitivity of the developed probe reaches 13.99 txe/mN in transverse direction and 5.90 p,e/mN in Z direction. The minimum inherent frequency of the probe is 1291.6 Hz and the probe is not easy to resonate. The probe response and stable time are both less than 0.1 ms. The devel- oped probe has good real - time performance and stability, which can be used in the measurement trigger of three coordinate measuring machine.

关 键 词：纳米测头 弹性支承 正交试验法 ANSYS仿真分析 

分 类 号：TH721[机械工程—仪器科学与技术]