石英波导环形谐振器研制  

The design and manufacture of the ring resonator made in quartz

作　　者：陈子维 陈抱雪[1] 汪昌君 方锦辉[1] 

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093

出　　处：《光学仪器》2015年第6期531-534,共4页Optical Instruments

基　　金：国家自然科学基金资助项目(61077042;60677032;60967003);上海市重点学科(第三期)资助项目(S30502)

摘　　要：设计和试制了一种基于石英材料的开放式光波导环形谐振器,器件设计采用数值仿真计算结合BPM仿真的手段。结合商用石英波导的常规参数,设计取环行波导的传输损耗和定向耦合器的耦合损耗分别为0.1dB/cm和0.1dB,谐振谱共振锐度的设计值为16.7。器件制备采用PECVD技术结合FHD技术的工艺,样品测试采用了0.1nm带宽的DFB激光,观察到了明显的谐振谱。A kind of open-mode optical waveguide ring resonator that based on quartz materials is designed and manufactured.The design is by means of numerical simulation combined with BPM simulation.Transmission loss of circular waveguide is 0.1 dB/cm and directional coupler coupling loss is 0.1 dB.The sharpness of the resonance spectrum is 16.7.The PECVD technology was used with FHD technique to manufacture the optical waveguide ring resonator. DFB laser of 0.1 nm bandwidth was used to test sample and the resonance spectrum could be observed easily.

关 键 词：导波光学 光波导环形谐振器 石英波导 谐振谱 

分 类 号：TN252[电子电信—物理电子学]