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作 者:修三木 WEI Tiefeng YANG Ye ZHANG Ting 李佳 SONG Weijie
机构地区:[1]School of Electrical Engineering, Beijing Jiaotong University [2]Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences
出 处:《Journal of Wuhan University of Technology(Materials Science)》2015年第6期1134-1139,共6页武汉理工大学学报(材料科学英文版)
基 金:Founded by the Natural Science Foundation of China(No.21377063);the Zhejiang Natural Science Foundation(No.LY15F040004);the Ningbo Key Laboratory of Silicon and Organic Thin Film Optoelectronic Technologies
摘 要:We comprehensively study the co-precipitation preparation of aluminum doped zinc oxide(AZO) nanoparticles, ceramic target and thin fi lm deposition. The nanoparticles calcined below 700 ℃ possessed pure wurtzite structure of ZnO. When the calcination temperature exceeded 700 ℃, ZnAl2O4 phase appeared. The resistivity and relative density of the AZO target pressed from nanoparticles were 3×10^-3 Ω·cm and 99.1%, respectively. The minimum resistivity of AZO thin films prepared by DC sputtering of the ceramic target reached 4.1×10^-4Ω·cm with the mobility of 33 cm^2/v·s and the carrier concentration of 4.5 ×10^20 cm^-3. The average optical transmittance of the AZO thin films in the visible wavelength range(400-800 nm) was more than 80%.We comprehensively study the co-precipitation preparation of aluminum doped zinc oxide(AZO) nanoparticles, ceramic target and thin fi lm deposition. The nanoparticles calcined below 700 ℃ possessed pure wurtzite structure of ZnO. When the calcination temperature exceeded 700 ℃, ZnAl2O4 phase appeared. The resistivity and relative density of the AZO target pressed from nanoparticles were 3×10^-3 Ω·cm and 99.1%, respectively. The minimum resistivity of AZO thin films prepared by DC sputtering of the ceramic target reached 4.1×10^-4Ω·cm with the mobility of 33 cm^2/v·s and the carrier concentration of 4.5 ×10^20 cm^-3. The average optical transmittance of the AZO thin films in the visible wavelength range(400-800 nm) was more than 80%.
关 键 词:co-precipitation AZO electrical properties optical properties
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