Preparation of AZO Nanoparticles, Ceramic Targets and Thin Films by a Co-precipitaition Method  

作　　者：修三木 WEI Tiefeng YANG Ye ZHANG Ting 李佳 SONG Weijie 

机构地区：[1]School of Electrical Engineering, Beijing Jiaotong University [2]Ningbo Institute of Material Technology and Engineering, Chinese Academy of Sciences

出　　处：《Journal of Wuhan University of Technology(Materials Science)》2015年第6期1134-1139,共6页武汉理工大学学报（材料科学英文版）

基　　金：Founded by the Natural Science Foundation of China(No.21377063);the Zhejiang Natural Science Foundation(No.LY15F040004);the Ningbo Key Laboratory of Silicon and Organic Thin Film Optoelectronic Technologies

摘　　要：We comprehensively study the co-precipitation preparation of aluminum doped zinc oxide（AZO） nanoparticles, ceramic target and thin fi lm deposition. The nanoparticles calcined below 700 ℃ possessed pure wurtzite structure of ZnO. When the calcination temperature exceeded 700 ℃, ZnAl2O4 phase appeared. The resistivity and relative density of the AZO target pressed from nanoparticles were 3×10^-3 Ω·cm and 99.1%, respectively. The minimum resistivity of AZO thin films prepared by DC sputtering of the ceramic target reached 4.1×10^-4Ω·cm with the mobility of 33 cm^2/v·s and the carrier concentration of 4.5 ×10^20 cm^-3. The average optical transmittance of the AZO thin films in the visible wavelength range（400-800 nm） was more than 80%.We comprehensively study the co-precipitation preparation of aluminum doped zinc oxide（AZO） nanoparticles, ceramic target and thin fi lm deposition. The nanoparticles calcined below 700 ℃ possessed pure wurtzite structure of ZnO. When the calcination temperature exceeded 700 ℃, ZnAl2O4 phase appeared. The resistivity and relative density of the AZO target pressed from nanoparticles were 3×10^-3 Ω·cm and 99.1%, respectively. The minimum resistivity of AZO thin films prepared by DC sputtering of the ceramic target reached 4.1×10^-4Ω·cm with the mobility of 33 cm^2/v·s and the carrier concentration of 4.5 ×10^20 cm^-3. The average optical transmittance of the AZO thin films in the visible wavelength range（400-800 nm） was more than 80%.

关 键 词：co-precipitation AZO electrical properties optical properties 

分 类 号：TQ174.1[化学工程—陶瓷工业]