地平仪用薄膜型红外热敏探测器的制备研究  

Research on Fabrication Technologies of Thin Film Infrared Thermistor Detectors for Horizon Sensors

作　　者：贾嘉[1,2] 李向阳[1,2] 侯云[3] 黄志明[3] 蔡愚[4] 

机构地区：[1]中国科学院上海技术物理研究所传感技术国家重点实验室,上海200083 [2]中国科学院上海技术物理研究所中国科学院红外成像材料与器件重点实验室,上海200083 [3]中国科学院上海技术物理研究所红外物理国家重点实验室,上海200083 [4]中国科学院上海技术物理研究所热敏探测器组,上海200083

出　　处：《红外》2015年第12期8-12,17,共6页Infrared

摘　　要：红外地平仪是卫星姿态控制系统的重要设备之一,而热敏电阻红外探头又是红外地平仪的一个关键部件,其质量会直接影响地平仪的性能和可靠性。随着近代空间技术的不断发展,下一代红外地平仪对研制高可靠性、长线列的红外热敏探测器的需求日益迫切。近年来,人们采用化学溶液法在制备锰钴镍氧(Mn-Co-Ni-O或MCN)薄膜材料方面取得了突破。该材料的致密性远远超过陶瓷体材料,可以为长寿命、高可靠性的热敏器件提供一个很好的解决方案。而MCN薄膜型探测器的类微电子制备技术也为实现长线列的多元热敏探测器奠定了基础。采用微电子工艺制作了地平仪用锰钴镍薄膜型红外热敏探测器,并对其中的一些关键工艺(如刻蚀和退火等)进行了颇有裨益的研究。这些新工艺和新方法对于实现薄膜热敏红外探测器在我国空间观测与遥感技术领域的工程应用以及提高红外地平仪的可靠性和使用寿命都有着重要意义。An infrared horizon sensor is one of the important equipment of a satellite attitude control system.And yet,an infrared thermistor detector is the key unit of the infrared horizon sensor.Its quality is directly related to the performance and reliability of the infrared horizon sensor.With the continuous development of modern space technology,the next generation of infrared horizon sensors have an urgent demand for high-reliability long linear array infrared thermistor detectors.In recent years,researchers have made a great breakthrough in synthesizing Mn-Co-Ni-O（MCN） thin films by a novel chemical solution deposition（CSD） method.Since the compactness of MCN films is much better than that of sintering ceramic materials,it is possible to use it to fabricate long life and high-reliability infrared thermistor detectors.In addition,the similarity between the fabrication technology of MCN thin film detectors and that of microelectronic devices has provided the basis of fabricating long linear thermistor detector arrays.High quality MCN thin film infrared thermistor detectors are fabricated by microelectronic processes.Some key processes such as etching and annealing are studied.These new technologies and methods are of significance both to the application of thin film infrared thermistor detectors in the fields of space observation and remote sensing of our country and to the improvement of reliability and lifetime of horizon sensors.

关 键 词：锰钴镍氧 薄膜 热敏探测器 红外地平仪 制备技术 

分 类 号：TN215[电子电信—物理电子学]