光滑表面粗糙度R_z参数的一种干涉测量法  

One Kind of Interferometry Measurement Method about Roughness Parameter R_z of Smooth Surface

作　　者：褚长亮 屈光辉[1] 王武孝[2] 刘满仓[1] 刘如军[1] 张琴[1] 

机构地区：[1]西安理工大学理学院,陕西西安710054 [2]西安理工大学材料科学与工程学院,陕西西安710054

出　　处：《物理通报》2016年第1期71-74,共4页Physics Bulletin

摘　　要：介绍了一种光滑表面粗糙度Rz参数的干涉测量法．该方法用空气膜层上表面与样本表面的基准面平行的方式来观察等厚干涉条纹，用干涉条纹间的相对运动来判断样本表面的峰谷，同时也给出了新的Rz计算公式．该方法测量过程较简单、对仪器要求较低且有助于样本的表面微观形貌分析．One kind of interferometry of roughness parameter Rz of smooth surface is introduced,which observes the equal thickness interference fringes by the way that upper surface of the air film is parallel to the datum plane of the surface of a sample,and judges peeks and valleys of the surface of a sample by relative motion between interference fringes. A new computational formula of Rz is also given. The method in this paper is simple in measuring process and undemanding on measuring instruments. At the same time,this method is helpful to surface microcosmic profile analysis of a sample.

关 键 词：表面粗糙度 干涉测量法 表面微观形貌分析 

分 类 号：TG84[金属学及工艺—公差测量技术]