微型紫外光纤光谱仪的光学系统设计及性能检测  

Optical system design and performance detection of a miniature UV fiber-optic spectrometer

作　　者：王璐[1] 裘燕青[1] 周盛华[1] 王成群[2] 

机构地区：[1]中国计量学院光学与电子科技学院,浙江杭州310018 [2]浙江理工大学信息学院,浙江杭州310018

出　　处：《中国计量学院学报》2015年第4期435-441,共7页Journal of China Jiliang University

基　　金：浙江省科技厅公益技术应用研究项目(No.2014C31114)

摘　　要：采用非对称交叉的切尼尔-特纳（C-T）光路结构,设计了一种微型紫外光纤光谱仪的光学系统.用ZEMAX对光路进行仿真、像质评价和优化,对各类像差进行校正.同时,对不同狭缝尺寸和光栅常数的光谱仪理论分辨率进行了分析.当采用30μm狭缝和1 800线/mm光栅时,模拟光学系统在180~270nm光谱范围内整体分辨率优于0.5nm,在180nm附近最高分辨率达到0.1nm.最后,基于该光学设计研制了一台光谱仪样机,在使用交流电弧激发金属纯铁样品的条件下,对原子发射光谱进行了检测.The optical system of a miniature UV fiber-optic spectrometer with asymmetrical crossed Czerny- Turner（C-T） structure was designed. ZEMAX was used for optical simulation, image quality evaluation and optimization. The theoretical resolution, the slit width and the grating constant were analyzed. The simulation results show that the resolution of the spectrometer was better than 0.5 nm at the wavelength range of 180~ 270 nm when the slit was 30 μm and the planar reflection grating was 1 800 grooves/mm. The highest resolution was 0. 1 nm at 180 nm. A UV spectrometer prototype was manufactured based on this optical design. We tested the spectrometer by using the AC arc excited iron atomic spectrum.

关 键 词：光谱仪 紫外光谱 光学设计 ZEMAX软件 

分 类 号：TH744[机械工程—光学工程]